Utilizing a Diffractive Focus Beam Shaper to Enhance Pattern Uniformity and Process Throughput during Direct Laser Interference Patterning

Utilizing a Diffractive Focus Beam Shaper to Enhance Pattern Uniformity and Process Throughput during Direct Laser Interference Patterning

Uniform periodic microstructure formation over large areas is generally challenging in Direct Laser Interference Patterning (DLIP) due to the Gaussian laser beam intensity distribution inherent to most commercial laser sources. In this work, a diffractive fundamental beam-mode shaper (FBS) element i...

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Bibliographic Details
Main Authors: Mikhael El-Khoury, Bogdan Voisiat, Tim Kunze, Andrés Fabián Lasagni
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Materials
Subjects:
direct laser interference patterning
fundamental beam mode shaper
top-hat beam profile
filling-factor
throughput
homogeneity
Online Access:https://www.mdpi.com/1996-1944/15/2/591

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