All-solid-state AlGaN/GaN-based ion-sensitive heterostructure field effect transistor pH sensor microprobe encapsulated in medical needle

All-solid-state AlGaN/GaN-based ion-sensitive heterostructure field effect transistor pH sensor microprobe encapsulated in medical needle

It is very important to monitor pH values. In this paper, we fabricated an all-solid-state AlGaN/GaN-based ion-sensitive heterostructure field effect transistor (ISHFET) pH sensor microprobe. The microprobe could facilitate measurement of pH values. The microprobe was fabricated by packaging the pH...

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Bibliographic Details
Main Authors: Fengge Wang, Minjie Zhang, Honghui Liu, Yanyan Xu, Zhiwen Liang, Junyu Shen, Zhengwen Xiao, Chaokun Yan, Zhisheng Wu, Yang Liu, Baijun Zhang
Format: Article
Language:English
Published: AIP Publishing LLC 2022-09-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/6.0001960

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