High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement Sensor

High precision position control is essential in the process of parts manufacturing and assembling, where eddy current displacement sensors (ECDSs) are widely used owing to the advantages of non-contact sensing, compact volume, and resistance to harsh conditions. To solve the nonlinear characteristic...

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Main Authors: Wei Liu, Bing Liang, Zhenyuan Jia, Di Feng, Xintong Jiang, Xiao Li, Mengde Zhou
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/18/9/2842
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author Wei Liu
Bing Liang
Zhenyuan Jia
Di Feng
Xintong Jiang
Xiao Li
Mengde Zhou
author_facet Wei Liu
Bing Liang
Zhenyuan Jia
Di Feng
Xintong Jiang
Xiao Li
Mengde Zhou
author_sort Wei Liu
collection DOAJ
description High precision position control is essential in the process of parts manufacturing and assembling, where eddy current displacement sensors (ECDSs) are widely used owing to the advantages of non-contact sensing, compact volume, and resistance to harsh conditions. To solve the nonlinear characteristics of the sensors, a high-accuracy calibration method based on linearity adjustment is proposed for ECDSs in this paper, which markedly improves the calibration accuracy and then the measurement accuracy. After matching the displacement value and the output voltage of the sensors, firstly, the sensitivity is adjusted according to the specified output range. Then, the weighted support vector adjustment models with the optimal weight of the zero-scale, mid-scale and full-scale are established respectively to cyclically adjust the linearity of the output characteristic curve. Finally, the final linearity adjustment model is obtained, and both the calibration accuracy and precision are verified by the established calibration system. Experimental results show that the linearity of the output characteristic curve of ECDS adjusted by the calibration method reaches over 99.9%, increasing by 1.9–5.0% more than the one of the original. In addition, the measurement accuracy improves from 11–25 μ m to 1–10 μ m in the range of 6mm, which provides a reliable guarantee for high accuracy displacement measurement.
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spelling doaj.art-bf65012623d7429fbc5bec346656c7762022-12-22T04:01:26ZengMDPI AGSensors1424-82202018-08-01189284210.3390/s18092842s18092842High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement SensorWei Liu0Bing Liang1Zhenyuan Jia2Di Feng3Xintong Jiang4Xiao Li5Mengde Zhou6Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaHigh precision position control is essential in the process of parts manufacturing and assembling, where eddy current displacement sensors (ECDSs) are widely used owing to the advantages of non-contact sensing, compact volume, and resistance to harsh conditions. To solve the nonlinear characteristics of the sensors, a high-accuracy calibration method based on linearity adjustment is proposed for ECDSs in this paper, which markedly improves the calibration accuracy and then the measurement accuracy. After matching the displacement value and the output voltage of the sensors, firstly, the sensitivity is adjusted according to the specified output range. Then, the weighted support vector adjustment models with the optimal weight of the zero-scale, mid-scale and full-scale are established respectively to cyclically adjust the linearity of the output characteristic curve. Finally, the final linearity adjustment model is obtained, and both the calibration accuracy and precision are verified by the established calibration system. Experimental results show that the linearity of the output characteristic curve of ECDS adjusted by the calibration method reaches over 99.9%, increasing by 1.9–5.0% more than the one of the original. In addition, the measurement accuracy improves from 11–25 μ m to 1–10 μ m in the range of 6mm, which provides a reliable guarantee for high accuracy displacement measurement.http://www.mdpi.com/1424-8220/18/9/2842eddy current displacement sensorcalibrationlinearity adjustmentweighted support vector machine
spellingShingle Wei Liu
Bing Liang
Zhenyuan Jia
Di Feng
Xintong Jiang
Xiao Li
Mengde Zhou
High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement Sensor
Sensors
eddy current displacement sensor
calibration
linearity adjustment
weighted support vector machine
title High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement Sensor
title_full High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement Sensor
title_fullStr High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement Sensor
title_full_unstemmed High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement Sensor
title_short High-Accuracy Calibration Based on Linearity Adjustment for Eddy Current Displacement Sensor
title_sort high accuracy calibration based on linearity adjustment for eddy current displacement sensor
topic eddy current displacement sensor
calibration
linearity adjustment
weighted support vector machine
url http://www.mdpi.com/1424-8220/18/9/2842
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