Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection
The response property and stability of diamond Schottky barrier photodiodes (SBPDs) were investigated for the monitor applications of deep ultraviolet (DUV) light and high-energy radiation particles. The SBPDs were fabricated on the unintentionally doped insulating diamond epilayer grown on a heavil...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2022-12-01
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| Series: | Functional Diamond |
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| Online Access: | http://dx.doi.org/10.1080/26941112.2022.2150526 |
| _version_ | 1797661078031695872 |
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| author | Masataka Imura Manabu Togawa Masaya Miyahara Hironori Okumura Jiro Nishinaga Meiyong Liao Yasuo Koide |
| author_facet | Masataka Imura Manabu Togawa Masaya Miyahara Hironori Okumura Jiro Nishinaga Meiyong Liao Yasuo Koide |
| author_sort | Masataka Imura |
| collection | DOAJ |
| description | The response property and stability of diamond Schottky barrier photodiodes (SBPDs) were investigated for the monitor applications of deep ultraviolet (DUV) light and high-energy radiation particles. The SBPDs were fabricated on the unintentionally doped insulating diamond epilayer grown on a heavily boron-doped p+-diamond (100) conductive substrate by microwave plasma chemical vapor deposition. The vertical-type SBPDs were constructed of semitransparent tungsten carbide (WC) Schottky contact on the top of the device and a WC/titanium ohmic contact on the bottom. The SBPDs were operated to detect the DUV light and protons in zero-bias photovoltaic mode. The spectral response of the SBPDs showed that the peak wavelength was at 182 nm with a sensitivity of 46 ± 1 mA/W. The response speed was shorter than 1 sec, with a negligible charge-up effect and persistent photoconductivity. The SBPDs showed a stable response upon the irradiation by 172-nm xenon excimer lamp with 70 mW/cm2 for 200 hrs and 70 MeV protons for the dose of 10 MGy, corresponding to a non-ionizing energy loss of 1.4 × 1016 MeV neq/cm2. |
| first_indexed | 2024-03-11T18:40:06Z |
| format | Article |
| id | doaj.art-bf79685c0c594ed0b5eae722d65530ce |
| institution | Directory Open Access Journal |
| issn | 2694-1120 |
| language | English |
| last_indexed | 2024-03-11T18:40:06Z |
| publishDate | 2022-12-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | Functional Diamond |
| spelling | doaj.art-bf79685c0c594ed0b5eae722d65530ce2023-10-12T13:43:53ZengTaylor & Francis GroupFunctional Diamond2694-11202022-12-012116717410.1080/26941112.2022.21505262150526Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detectionMasataka Imura0Manabu Togawa1Masaya Miyahara2Hironori Okumura3Jiro Nishinaga4Meiyong Liao5Yasuo Koide6Research Center for Functional Materials, National Institute for Materials Science (NIMS)Institute of Particle and Nuclear Studies, and International Center for Quantum-field Measurement Systems for Studies of the Universe and Particles (QUP, WPI), High Energy Accelerator Research Organization (KEK)Institute of Particle and Nuclear Studies, and International Center for Quantum-field Measurement Systems for Studies of the Universe and Particles (QUP, WPI), High Energy Accelerator Research Organization (KEK)Faculty of Pure and Applied Sciences, University of TsukubaResearch Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology (AIST)Research Center for Functional Materials, National Institute for Materials Science (NIMS)Research Center for Functional Materials, National Institute for Materials Science (NIMS)The response property and stability of diamond Schottky barrier photodiodes (SBPDs) were investigated for the monitor applications of deep ultraviolet (DUV) light and high-energy radiation particles. The SBPDs were fabricated on the unintentionally doped insulating diamond epilayer grown on a heavily boron-doped p+-diamond (100) conductive substrate by microwave plasma chemical vapor deposition. The vertical-type SBPDs were constructed of semitransparent tungsten carbide (WC) Schottky contact on the top of the device and a WC/titanium ohmic contact on the bottom. The SBPDs were operated to detect the DUV light and protons in zero-bias photovoltaic mode. The spectral response of the SBPDs showed that the peak wavelength was at 182 nm with a sensitivity of 46 ± 1 mA/W. The response speed was shorter than 1 sec, with a negligible charge-up effect and persistent photoconductivity. The SBPDs showed a stable response upon the irradiation by 172-nm xenon excimer lamp with 70 mW/cm2 for 200 hrs and 70 MeV protons for the dose of 10 MGy, corresponding to a non-ionizing energy loss of 1.4 × 1016 MeV neq/cm2.http://dx.doi.org/10.1080/26941112.2022.2150526diamondschottky barrier photodiodedeep-ultraviolet lightdetector for xenon excimer lampdetector for protons |
| spellingShingle | Masataka Imura Manabu Togawa Masaya Miyahara Hironori Okumura Jiro Nishinaga Meiyong Liao Yasuo Koide Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection Functional Diamond diamond schottky barrier photodiode deep-ultraviolet light detector for xenon excimer lamp detector for protons |
| title | Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection |
| title_full | Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection |
| title_fullStr | Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection |
| title_full_unstemmed | Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection |
| title_short | Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection |
| title_sort | highly tolerant diamond schottky barrier photodiodes for deep ultraviolet xenon excimer lamp and protons detection |
| topic | diamond schottky barrier photodiode deep-ultraviolet light detector for xenon excimer lamp detector for protons |
| url | http://dx.doi.org/10.1080/26941112.2022.2150526 |
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