Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System

MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resoluti...

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Main Authors: Fahu Xu, Dayong Qiao, Changfeng Xia, Xiumin Song, Wenhui Zheng, Yaojun He, Qiaodan Fan
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/3/353
_version_ 1797444946707349504
author Fahu Xu
Dayong Qiao
Changfeng Xia
Xiumin Song
Wenhui Zheng
Yaojun He
Qiaodan Fan
author_facet Fahu Xu
Dayong Qiao
Changfeng Xia
Xiumin Song
Wenhui Zheng
Yaojun He
Qiaodan Fan
author_sort Fahu Xu
collection DOAJ
description MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.
first_indexed 2024-03-09T13:18:48Z
format Article
id doaj.art-bfa97395182344d1a30e1180f1e6a498
institution Directory Open Access Journal
issn 2072-666X
language English
last_indexed 2024-03-09T13:18:48Z
publishDate 2022-02-01
publisher MDPI AG
record_format Article
series Micromachines
spelling doaj.art-bfa97395182344d1a30e1180f1e6a4982023-11-30T21:32:49ZengMDPI AGMicromachines2072-666X2022-02-0113335310.3390/mi13030353Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR SystemFahu Xu0Dayong Qiao1Changfeng Xia2Xiumin Song3Wenhui Zheng4Yaojun He5Qiaodan Fan6Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaXi’An Zhisensor Technologies Co., Ltd., Xi’an 710072, ChinaXi’An Zhisensor Technologies Co., Ltd., Xi’an 710072, ChinaXi’An Zhisensor Technologies Co., Ltd., Xi’an 710072, ChinaXi’An Zhisensor Technologies Co., Ltd., Xi’an 710072, ChinaXi’An Zhisensor Technologies Co., Ltd., Xi’an 710072, ChinaMEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.https://www.mdpi.com/2072-666X/13/3/353MEMS LiDARreconfigurable angular resolutionseparate-axis Lissajous scanning
spellingShingle Fahu Xu
Dayong Qiao
Changfeng Xia
Xiumin Song
Wenhui Zheng
Yaojun He
Qiaodan Fan
Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System
Micromachines
MEMS LiDAR
reconfigurable angular resolution
separate-axis Lissajous scanning
title Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System
title_full Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System
title_fullStr Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System
title_full_unstemmed Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System
title_short Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System
title_sort reconfigurable angular resolution design method in a separate axis lissajous scanning mems lidar system
topic MEMS LiDAR
reconfigurable angular resolution
separate-axis Lissajous scanning
url https://www.mdpi.com/2072-666X/13/3/353
work_keys_str_mv AT fahuxu reconfigurableangularresolutiondesignmethodinaseparateaxislissajousscanningmemslidarsystem
AT dayongqiao reconfigurableangularresolutiondesignmethodinaseparateaxislissajousscanningmemslidarsystem
AT changfengxia reconfigurableangularresolutiondesignmethodinaseparateaxislissajousscanningmemslidarsystem
AT xiuminsong reconfigurableangularresolutiondesignmethodinaseparateaxislissajousscanningmemslidarsystem
AT wenhuizheng reconfigurableangularresolutiondesignmethodinaseparateaxislissajousscanningmemslidarsystem
AT yaojunhe reconfigurableangularresolutiondesignmethodinaseparateaxislissajousscanningmemslidarsystem
AT qiaodanfan reconfigurableangularresolutiondesignmethodinaseparateaxislissajousscanningmemslidarsystem