Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry

Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry

Nowadays, Predictive Maintenance is a mandatory tool to reduce the cost of production in the semiconductor industry. This paper considers as a case study a critical part of the electrochemical deposition system, namely, the four Pins that hold a wafer inside a chamber. The aim of the study is to rep...

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Main Authors: Umberto Amato, Anestis Antoniadis, Italia De Feis, Domenico Fazio, Caterina Genua, Irène Gijbels, Donatella Granata, Antonino La Magna, Daniele Pagano, Gabriele Tochino, Patrizia Vasquez
格式: 文件
语言:English
出版: MDPI AG 2023-07-01
丛编:Sensors
主题:
semiconductors
Predictive Maintenance
image processing
optical sensor
在线阅读:https://www.mdpi.com/1424-8220/23/14/6249

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https://www.mdpi.com/1424-8220/23/14/6249

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