Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications

In this work, textured, well-faceted ZnO materials grown on planar Si(100), planar Si(111), and textured Si(100) substrates by low-pressure chemical vapor deposition (LPCVD) were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and cathode lumin...

Full description

Bibliographic Details
Main Authors: Chin-Yi Tsai, Jyong-Di Lai, Shih-Wei Feng, Chien-Jung Huang, Chien-Hsun Chen, Fann-Wei Yang, Hsiang-Chen Wang, Li-Wei Tu
Format: Article
Language:English
Published: Beilstein-Institut 2017-09-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.8.194
_version_ 1828432288190300160
author Chin-Yi Tsai
Jyong-Di Lai
Shih-Wei Feng
Chien-Jung Huang
Chien-Hsun Chen
Fann-Wei Yang
Hsiang-Chen Wang
Li-Wei Tu
author_facet Chin-Yi Tsai
Jyong-Di Lai
Shih-Wei Feng
Chien-Jung Huang
Chien-Hsun Chen
Fann-Wei Yang
Hsiang-Chen Wang
Li-Wei Tu
author_sort Chin-Yi Tsai
collection DOAJ
description In this work, textured, well-faceted ZnO materials grown on planar Si(100), planar Si(111), and textured Si(100) substrates by low-pressure chemical vapor deposition (LPCVD) were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and cathode luminescence (CL) measurements. The results show that ZnO grown on planar Si(100), planar Si(111), and textured Si(100) substrates favor the growth of ZnO(110) ridge-like, ZnO(002) pyramid-like, and ZnO(101) pyramidal-tip structures, respectively. This could be attributed to the constraints of the lattice mismatch between the ZnO and Si unit cells. The average grain size of ZnO on the planar Si(100) substrate is slightly larger than that on the planar Si(111) substrate, while both of them are much larger than that on the textured Si(100) substrate. The average grain sizes (about 10–50 nm) of the ZnO grown on the different silicon substrates decreases with the increase of their strains. These results are shown to strongly correlate with the results from the SEM, AFM, and CL as well. The reflectance spectra of these three samples show that the antireflection function provided by theses samples mostly results from the nanometer-scaled texture of the ZnO films, while the micrometer-scaled texture of the Si substrate has a limited contribution. The results of this work provide important information for optimized growth of textured and well-faceted ZnO grown on wafer-based silicon solar cells and can be utilized for efficiency enhancement and optimization of device materials and structures, such as heterojunction with intrinsic thin layer (HIT) solar cells.
first_indexed 2024-12-10T18:17:41Z
format Article
id doaj.art-bfe8fc5bc6d34c0a9e019f46658e143c
institution Directory Open Access Journal
issn 2190-4286
language English
last_indexed 2024-12-10T18:17:41Z
publishDate 2017-09-01
publisher Beilstein-Institut
record_format Article
series Beilstein Journal of Nanotechnology
spelling doaj.art-bfe8fc5bc6d34c0a9e019f46658e143c2022-12-22T01:38:18ZengBeilstein-InstitutBeilstein Journal of Nanotechnology2190-42862017-09-01811939194510.3762/bjnano.8.1942190-4286-8-194Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applicationsChin-Yi Tsai0Jyong-Di Lai1Shih-Wei Feng2Chien-Jung Huang3Chien-Hsun Chen4Fann-Wei Yang5Hsiang-Chen Wang6Li-Wei Tu7Department of Applied Physics, National University of Kaohsiung, No.700, Kaohsiung University Road, Nanzih Dist., Kaohsiung 811, Taiwan, R.O.CDepartment of Applied Physics, National University of Kaohsiung, No.700, Kaohsiung University Road, Nanzih Dist., Kaohsiung 811, Taiwan, R.O.CDepartment of Applied Physics, National University of Kaohsiung, No.700, Kaohsiung University Road, Nanzih Dist., Kaohsiung 811, Taiwan, R.O.CDepartment of Applied Physics, National University of Kaohsiung, No.700, Kaohsiung University Road, Nanzih Dist., Kaohsiung 811, Taiwan, R.O.CGreen Energy and Environment Research Labs, Industrial Technology Research Institute, Hsinchu, Taiwan, R.O.CDepartment of Electronic Engineering, Southern Taiwan University of Science and Technology, Tainan, Taiwan, R.O.CGraduate Institute of Opto-Mechatronics, National Chung Cheng University, Chia-yi, Taiwan, R.O.CDepartment of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.CIn this work, textured, well-faceted ZnO materials grown on planar Si(100), planar Si(111), and textured Si(100) substrates by low-pressure chemical vapor deposition (LPCVD) were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and cathode luminescence (CL) measurements. The results show that ZnO grown on planar Si(100), planar Si(111), and textured Si(100) substrates favor the growth of ZnO(110) ridge-like, ZnO(002) pyramid-like, and ZnO(101) pyramidal-tip structures, respectively. This could be attributed to the constraints of the lattice mismatch between the ZnO and Si unit cells. The average grain size of ZnO on the planar Si(100) substrate is slightly larger than that on the planar Si(111) substrate, while both of them are much larger than that on the textured Si(100) substrate. The average grain sizes (about 10–50 nm) of the ZnO grown on the different silicon substrates decreases with the increase of their strains. These results are shown to strongly correlate with the results from the SEM, AFM, and CL as well. The reflectance spectra of these three samples show that the antireflection function provided by theses samples mostly results from the nanometer-scaled texture of the ZnO films, while the micrometer-scaled texture of the Si substrate has a limited contribution. The results of this work provide important information for optimized growth of textured and well-faceted ZnO grown on wafer-based silicon solar cells and can be utilized for efficiency enhancement and optimization of device materials and structures, such as heterojunction with intrinsic thin layer (HIT) solar cells.https://doi.org/10.3762/bjnano.8.194atomic force microscopycathode luminescencescanning electron microscopysilicon solar cellstransparent conducting oxideX-ray diffractionZnO
spellingShingle Chin-Yi Tsai
Jyong-Di Lai
Shih-Wei Feng
Chien-Jung Huang
Chien-Hsun Chen
Fann-Wei Yang
Hsiang-Chen Wang
Li-Wei Tu
Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications
Beilstein Journal of Nanotechnology
atomic force microscopy
cathode luminescence
scanning electron microscopy
silicon solar cells
transparent conducting oxide
X-ray diffraction
ZnO
title Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications
title_full Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications
title_fullStr Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications
title_full_unstemmed Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications
title_short Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications
title_sort growth and characterization of textured well faceted zno on planar si 100 planar si 111 and textured si 100 substrates for solar cell applications
topic atomic force microscopy
cathode luminescence
scanning electron microscopy
silicon solar cells
transparent conducting oxide
X-ray diffraction
ZnO
url https://doi.org/10.3762/bjnano.8.194
work_keys_str_mv AT chinyitsai growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications
AT jyongdilai growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications
AT shihweifeng growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications
AT chienjunghuang growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications
AT chienhsunchen growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications
AT fannweiyang growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications
AT hsiangchenwang growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications
AT liweitu growthandcharacterizationoftexturedwellfacetedznoonplanarsi100planarsi111andtexturedsi100substratesforsolarcellapplications