Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor

This paper reports on the design, modeling, analysis, and evaluation of a micro-electromechanical systems acoustic sensor and the novel design of an acoustic vector sensor array (AVS) which utilized this acoustic sensor. This research builds upon previous work conducted to develop a small, lightweig...

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Main Authors: Justin Ivancic, Gamani Karunasiri, Fabio Alves
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/19/8217
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author Justin Ivancic
Gamani Karunasiri
Fabio Alves
author_facet Justin Ivancic
Gamani Karunasiri
Fabio Alves
author_sort Justin Ivancic
collection DOAJ
description This paper reports on the design, modeling, analysis, and evaluation of a micro-electromechanical systems acoustic sensor and the novel design of an acoustic vector sensor array (AVS) which utilized this acoustic sensor. This research builds upon previous work conducted to develop a small, lightweight, portable system for the detection and location of quiet or distant acoustic sources of interest. This study also reports on the underwater operation of this sensor and AVS. Studies were conducted in the lab and in the field utilizing multiple acoustic sources (e.g., generated tones, gun shots, drones). The sensor operates at resonance, providing for high acoustic sensitivity and a high signal-to-noise ratio (SNR). The sensor demonstrated a maximum SNR of 88 dB with an associated sensitivity of −84.6 dB re 1 V/μPa (59 V/Pa). The sensor design can be adjusted to set a specified resonant frequency to align with a known acoustic signature of interest. The AVS demonstrated an unambiguous, 360-degree, in-plane, azimuthal coverage and was able to provide an acoustic direction of arrival to an average error of within 3.5° during field experiments. The results of this research demonstrate the potential usefulness of this sensor and AVS design for specific applications.
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spelling doaj.art-c09027b53d6e4942afae268e90334e4b2023-11-19T15:04:24ZengMDPI AGSensors1424-82202023-10-012319821710.3390/s23198217Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector SensorJustin Ivancic0Gamani Karunasiri1Fabio Alves2Department of Physics, Naval Postgraduate School, Monterey, CA 93943, USADepartment of Physics, Naval Postgraduate School, Monterey, CA 93943, USADepartment of Physics, Naval Postgraduate School, Monterey, CA 93943, USAThis paper reports on the design, modeling, analysis, and evaluation of a micro-electromechanical systems acoustic sensor and the novel design of an acoustic vector sensor array (AVS) which utilized this acoustic sensor. This research builds upon previous work conducted to develop a small, lightweight, portable system for the detection and location of quiet or distant acoustic sources of interest. This study also reports on the underwater operation of this sensor and AVS. Studies were conducted in the lab and in the field utilizing multiple acoustic sources (e.g., generated tones, gun shots, drones). The sensor operates at resonance, providing for high acoustic sensitivity and a high signal-to-noise ratio (SNR). The sensor demonstrated a maximum SNR of 88 dB with an associated sensitivity of −84.6 dB re 1 V/μPa (59 V/Pa). The sensor design can be adjusted to set a specified resonant frequency to align with a known acoustic signature of interest. The AVS demonstrated an unambiguous, 360-degree, in-plane, azimuthal coverage and was able to provide an acoustic direction of arrival to an average error of within 3.5° during field experiments. The results of this research demonstrate the potential usefulness of this sensor and AVS design for specific applications.https://www.mdpi.com/1424-8220/23/19/8217MEMS acoustic sensorMEMS acoustic vector sensorresonant sensor
spellingShingle Justin Ivancic
Gamani Karunasiri
Fabio Alves
Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor
Sensors
MEMS acoustic sensor
MEMS acoustic vector sensor
resonant sensor
title Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor
title_full Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor
title_fullStr Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor
title_full_unstemmed Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor
title_short Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor
title_sort directional resonant mems acoustic sensor and associated acoustic vector sensor
topic MEMS acoustic sensor
MEMS acoustic vector sensor
resonant sensor
url https://www.mdpi.com/1424-8220/23/19/8217
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AT gamanikarunasiri directionalresonantmemsacousticsensorandassociatedacousticvectorsensor
AT fabioalves directionalresonantmemsacousticsensorandassociatedacousticvectorsensor