Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material

Summary: In this protocol, we present a facile nanoscale thermal mapping technique for electronic devices by use of atomic force microscopy and a phase change material Ge2Sb2Te5. We describe steps for Ge2Sb2Te5 thin film coating, Ge2Sb2Te5 temperature calibration, thermal mapping by varying heater p...

全面介绍

书目详细资料
Main Authors: Qilong Cheng, Sukumar Rajauria, Erhard Schreck, Robert Smith, Na Wang, Jim Reiner, Qing Dai, David Bogy
格式: 文件
语言:English
出版: Elsevier 2024-06-01
丛编:STAR Protocols
主题:
在线阅读:http://www.sciencedirect.com/science/article/pii/S2666166724002041
实物特征
总结:Summary: In this protocol, we present a facile nanoscale thermal mapping technique for electronic devices by use of atomic force microscopy and a phase change material Ge2Sb2Te5. We describe steps for Ge2Sb2Te5 thin film coating, Ge2Sb2Te5 temperature calibration, thermal mapping by varying heater power, and thermal mapping by varying heating time. The protocol can be applied for resolving surface temperatures of various operational microelectronic devices with a nanoscale precision.For complete details on the use and execution of this protocol, please refer to Cheng et al.1 : Publisher’s note: Undertaking any experimental protocol requires adherence to local institutional guidelines for laboratory safety and ethics.
ISSN:2666-1667