Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material

Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material

Summary: In this protocol, we present a facile nanoscale thermal mapping technique for electronic devices by use of atomic force microscopy and a phase change material Ge2Sb2Te5. We describe steps for Ge2Sb2Te5 thin film coating, Ge2Sb2Te5 temperature calibration, thermal mapping by varying heater p...

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Bibliographic Details
Main Authors: Qilong Cheng, Sukumar Rajauria, Erhard Schreck, Robert Smith, Na Wang, Jim Reiner, Qing Dai, David Bogy
Format: Article
Language:English
Published: Elsevier 2024-06-01
Series:STAR Protocols
Subjects:
Atomic Force Microscopy (AFM)
Microscopy
Physics
Material sciences
Online Access:http://www.sciencedirect.com/science/article/pii/S2666166724002041

Internet

http://www.sciencedirect.com/science/article/pii/S2666166724002041

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