Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material
Summary: In this protocol, we present a facile nanoscale thermal mapping technique for electronic devices by use of atomic force microscopy and a phase change material Ge2Sb2Te5. We describe steps for Ge2Sb2Te5 thin film coating, Ge2Sb2Te5 temperature calibration, thermal mapping by varying heater p...
| Auteurs principaux: | , , , , , , , |
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| Format: | Article |
| Langue: | English |
| Publié: |
Elsevier
2024-06-01
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| Collection: | STAR Protocols |
| Sujets: | |
| Accès en ligne: | http://www.sciencedirect.com/science/article/pii/S2666166724002041 |