Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material

Summary: In this protocol, we present a facile nanoscale thermal mapping technique for electronic devices by use of atomic force microscopy and a phase change material Ge2Sb2Te5. We describe steps for Ge2Sb2Te5 thin film coating, Ge2Sb2Te5 temperature calibration, thermal mapping by varying heater p...

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書目詳細資料
Main Authors: Qilong Cheng, Sukumar Rajauria, Erhard Schreck, Robert Smith, Na Wang, Jim Reiner, Qing Dai, David Bogy
格式: Article
語言:English
出版: Elsevier 2024-06-01
叢編:STAR Protocols
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在線閱讀:http://www.sciencedirect.com/science/article/pii/S2666166724002041