Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic Applications

The scientific interest on hybrid materials is mainly related to understanding the types of interactions between inorganic and organic component and the effect of these interactions on the properties of the new material formed. Hybrid nanostructured materials and especially dielectrics are used for...

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Main Authors: Elena Emanuela HERBEI, Claudiu-Ionuț VASILE
Format: Article
Language:English
Published: Galati University Press 2023-12-01
Series:The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science
Subjects:
Online Access:https://www.gup.ugal.ro/ugaljournals/index.php/mms/article/view/6510
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author Elena Emanuela HERBEI
Claudiu-Ionuț VASILE
author_facet Elena Emanuela HERBEI
Claudiu-Ionuț VASILE
author_sort Elena Emanuela HERBEI
collection DOAJ
description The scientific interest on hybrid materials is mainly related to understanding the types of interactions between inorganic and organic component and the effect of these interactions on the properties of the new material formed. Hybrid nanostructured materials and especially dielectrics are used for electronics (for gate layer) and especially those applicable in structure of different types of thin film transistors (TFTs). In this paper is presented the research on thin film hybrid materials based on tantalum oxide (Ta2O5) starting with inorganic precursor - tantalum ethoxide and polymethylmethacrylate (PMMA). The chemical method sol -gel involves the precursor-tantalum ethoxide which is hydrolysed and functionalized (with special siloxane compound), and the organic methyl methacrylate monomer. The chemical reactions take place at low temperature below 160 oC. The sol is deposited as thin films by spin-coating to analyse intensity-voltage (I-V) and capacitance-voltage curves (C-V) to determine the electric properties. Metal-Insulator-Metal (MIM) structures were made-up for electric characterisation. The value of leakage currents was between 10-10 - 10-7 A at ± 40 V. The hybrid films were analysed by scanning electron microscopy (SEM) for thickness and morphology and for thermal stability the sol was investigated by TG and DSC. The dielectric permittivity ranges between 3.5 and 4 at 1 MHz, depending on the tantalum alkoxide: MMA molar ratio, showing good behaviour for gate layer in future TFTs.
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spelling doaj.art-c1f821a432e24a68afc6811338c1034b2024-03-02T17:28:22ZengGalati University PressThe Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science2668-47482668-47562023-12-014649710110.35219/mms.2023.4.176510Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic ApplicationsElena Emanuela HERBEI0Claudiu-Ionuț VASILE1“Dunarea de Jos” University of Galati, Romania“Dunarea de Jos” University of Galati, Romania; 3Department of Psychiatry, “Elisabeta Doamna” Psychiatric Hospital, 8001 79, Galaţi, RomaniaThe scientific interest on hybrid materials is mainly related to understanding the types of interactions between inorganic and organic component and the effect of these interactions on the properties of the new material formed. Hybrid nanostructured materials and especially dielectrics are used for electronics (for gate layer) and especially those applicable in structure of different types of thin film transistors (TFTs). In this paper is presented the research on thin film hybrid materials based on tantalum oxide (Ta2O5) starting with inorganic precursor - tantalum ethoxide and polymethylmethacrylate (PMMA). The chemical method sol -gel involves the precursor-tantalum ethoxide which is hydrolysed and functionalized (with special siloxane compound), and the organic methyl methacrylate monomer. The chemical reactions take place at low temperature below 160 oC. The sol is deposited as thin films by spin-coating to analyse intensity-voltage (I-V) and capacitance-voltage curves (C-V) to determine the electric properties. Metal-Insulator-Metal (MIM) structures were made-up for electric characterisation. The value of leakage currents was between 10-10 - 10-7 A at ± 40 V. The hybrid films were analysed by scanning electron microscopy (SEM) for thickness and morphology and for thermal stability the sol was investigated by TG and DSC. The dielectric permittivity ranges between 3.5 and 4 at 1 MHz, depending on the tantalum alkoxide: MMA molar ratio, showing good behaviour for gate layer in future TFTs.https://www.gup.ugal.ro/ugaljournals/index.php/mms/article/view/6510hybrid materialsspin-coatingtantalum oxidepmma
spellingShingle Elena Emanuela HERBEI
Claudiu-Ionuț VASILE
Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic Applications
The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science
hybrid materials
spin-coating
tantalum oxide
pmma
title Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic Applications
title_full Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic Applications
title_fullStr Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic Applications
title_full_unstemmed Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic Applications
title_short Hybrid Nanostructures Based of Ta2O5-PMMA for Electronic Applications
title_sort hybrid nanostructures based of ta2o5 pmma for electronic applications
topic hybrid materials
spin-coating
tantalum oxide
pmma
url https://www.gup.ugal.ro/ugaljournals/index.php/mms/article/view/6510
work_keys_str_mv AT elenaemanuelaherbei hybridnanostructuresbasedofta2o5pmmaforelectronicapplications
AT claudiuionutvasile hybridnanostructuresbasedofta2o5pmmaforelectronicapplications