A Regulated Temperature-Insensitive High-Voltage Charge Pump in Standard CMOS Process for Micromachined Gyroscopes

A Regulated Temperature-Insensitive High-Voltage Charge Pump in Standard CMOS Process for Micromachined Gyroscopes

Micromachined gyroscopes require high voltage (HV) for actuation and detection to improve its precision, but the deviation of the HV caused by temperature fluctuations will degrade the sensor’s performance. In this paper, a high-voltage temperature-insensitive charge pump is proposed. With...

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Bibliographic Details
Main Authors: Xiang Li, Rui Li, Chunge Ju, Bo Hou, Qi Wei, Bin Zhou, Zhiyong Chen, Rong Zhang
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Sensors
Subjects:
high-voltage generation
regulated charge pump
temperature-insensitive
triple-well nmos transistor
standard cmos process
Online Access:https://www.mdpi.com/1424-8220/19/19/4149

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