ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal a...

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Main Authors: Izabela Constantinoiu, Cristian Viespe
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/18/5118
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author Izabela Constantinoiu
Cristian Viespe
author_facet Izabela Constantinoiu
Cristian Viespe
author_sort Izabela Constantinoiu
collection DOAJ
description Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.
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spelling doaj.art-c23cff7a12d64b98bb3a5737e20358e02023-11-20T12:59:11ZengMDPI AGSensors1424-82202020-09-012018511810.3390/s20185118ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A ReviewIzabela Constantinoiu0Cristian Viespe1National Institute for Laser, Plasma and Radiation Physics, Laser Department, Atomistilor 409, 077125 Magurele, RomaniaNational Institute for Laser, Plasma and Radiation Physics, Laser Department, Atomistilor 409, 077125 Magurele, RomaniaSurface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.https://www.mdpi.com/1424-8220/20/18/5118surface acoustic wavegassensormetal oxide semiconductorZnO
spellingShingle Izabela Constantinoiu
Cristian Viespe
ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review
Sensors
surface acoustic wave
gas
sensor
metal oxide semiconductor
ZnO
title ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review
title_full ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review
title_fullStr ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review
title_full_unstemmed ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review
title_short ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review
title_sort zno metal oxide semiconductor in surface acoustic wave sensors a review
topic surface acoustic wave
gas
sensor
metal oxide semiconductor
ZnO
url https://www.mdpi.com/1424-8220/20/18/5118
work_keys_str_mv AT izabelaconstantinoiu znometaloxidesemiconductorinsurfaceacousticwavesensorsareview
AT cristianviespe znometaloxidesemiconductorinsurfaceacousticwavesensorsareview