ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal a...

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Bibliographic Details
Main Authors:	Izabela Constantinoiu, Cristian Viespe
Format:	Article
Language:	English
Published:	MDPI AG 2020-09-01
Series:	Sensors
Subjects:	surface acoustic wave gas sensor metal oxide semiconductor ZnO
Online Access:	https://www.mdpi.com/1424-8220/20/18/5118

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