Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication
The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic opti...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-07-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/8/850 |
| _version_ | 1797522869666709504 |
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| author | Mikhail V. Pugachev Aliaksandr I. Duleba Arslan A. Galiullin Aleksandr Y. Kuntsevich |
| author_facet | Mikhail V. Pugachev Aliaksandr I. Duleba Arslan A. Galiullin Aleksandr Y. Kuntsevich |
| author_sort | Mikhail V. Pugachev |
| collection | DOAJ |
| description | The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic optical microscope. Suggested kit for the micromask lithography is compact and easily compatible with a glove box, thus being suitable for a wide range of air-unstable materials. The shadow masks could be either ordered commercially or fabricated in a laboratory using a beam lithography. The processes of the mask alignment and the resist exposure take a few minutes and provide a micrometer resolution. With the total price of the kit components around USD 200, our approach would be convenient for laboratories with the limited access to commercial lithographic systems. |
| first_indexed | 2024-03-10T08:35:29Z |
| format | Article |
| id | doaj.art-c2531178eb0d40aa9f738fc1ff6e3bfc |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T08:35:29Z |
| publishDate | 2021-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-c2531178eb0d40aa9f738fc1ff6e3bfc2023-11-22T08:43:01ZengMDPI AGMicromachines2072-666X2021-07-0112885010.3390/mi12080850Micromask Lithography for Cheap and Fast 2D Materials Microstructures FabricationMikhail V. Pugachev0Aliaksandr I. Duleba1Arslan A. Galiullin2Aleksandr Y. Kuntsevich3P.N. Lebedev Physical Institute of the Russian Academy of Science, 119991 Moscow, RussiaP.N. Lebedev Physical Institute of the Russian Academy of Science, 119991 Moscow, RussiaDepartment of Physics, National Research University The Higher School of Economics, 101000 Moscow, RussiaP.N. Lebedev Physical Institute of the Russian Academy of Science, 119991 Moscow, RussiaThe fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic optical microscope. Suggested kit for the micromask lithography is compact and easily compatible with a glove box, thus being suitable for a wide range of air-unstable materials. The shadow masks could be either ordered commercially or fabricated in a laboratory using a beam lithography. The processes of the mask alignment and the resist exposure take a few minutes and provide a micrometer resolution. With the total price of the kit components around USD 200, our approach would be convenient for laboratories with the limited access to commercial lithographic systems.https://www.mdpi.com/2072-666X/12/8/850lithographymask lithographyVan der Waals heterostructures2D materialsnanoelectronics |
| spellingShingle | Mikhail V. Pugachev Aliaksandr I. Duleba Arslan A. Galiullin Aleksandr Y. Kuntsevich Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication Micromachines lithography mask lithography Van der Waals heterostructures 2D materials nanoelectronics |
| title | Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication |
| title_full | Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication |
| title_fullStr | Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication |
| title_full_unstemmed | Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication |
| title_short | Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication |
| title_sort | micromask lithography for cheap and fast 2d materials microstructures fabrication |
| topic | lithography mask lithography Van der Waals heterostructures 2D materials nanoelectronics |
| url | https://www.mdpi.com/2072-666X/12/8/850 |
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