Review on the Vapour-Phase Synthesis of Aluminum Nitride Powder Using Thermal Plasmas
Production of high purity aluminum nitride powder which can be processed into electronic packages at a cost competitive with existing lower performance ceramic packages has promoted the development of many different synthesis methods. A survey...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Hosokawa Powder Technology Foundation
2014-05-01
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| Series: | KONA Powder and Particle Journal |
| Online Access: | https://www.jstage.jst.go.jp/article/kona/17/0/17_1999015/_pdf/-char/en |
| Summary: | Production of high purity aluminum nitride powder which can be processed into electronic packages at a cost competitive with existing lower performance ceramic packages has promoted the development of many different synthesis methods. A survey of the synthesis of ultrafine AIN powders using thermal plasmas is presented. Laboratory scale experiments, applying inductively coupled and transferred-arc plasma systems, have been used to produce nanosize powders by vapour-phase reaction between aluminum vapour and ammonia, using a reduced number of steps. The specific surface area of the powders reported are in the 12 to 280 m2/g range. Sinterability experiments have demonstrated that these powders can be compacted to full density at lower temperatures than powders produced by conventional methods. |
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| ISSN: | 0288-4534 2187-5537 |