Predicting Thin Film Stoichiometry In V-O2 Reactive Sputtering
<p>The electrical, optical and mechanical properties of compound oxides film depend strongly on the composition of the film, especially for vanadium oxide thin films, since the vanadium-oxygen phase diagram includes mixed valence oxides with two or more oxidation states. Therefore, it is inter...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Kaunas University of Technology
2015-06-01
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| Series: | Medžiagotyra |
| Subjects: | |
| Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/6910 |