Detection of backside coupled propagating surface plasmon resonance on the sidewall of a wafer
We proposed a surface plasmon resonance (SPR) sensor structure that utilized a glass wafer with a diffraction grating and an n-type silicon piece bonded near the SPR coupling site. This configuration enabled surface plasmon excitation from the back of the substrate without the unwanted interaction b...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0172613 |