Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie
Methods for enhancing the gripping ability of microtweezers are examined in terms of friction force. Two aspects are investigated experimentally. One is a method for increasing the coefficient of friction of the handling part of the microtweezers. We examined the effect of the etching time on the su...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2010-02-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/4/1/4_1_150/_pdf/-char/en |
| _version_ | 1818107896133582848 |
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| author | Satomitsu IMAI Tadashi ISHIKAWA Masakazu SATO Hiroki SATO Keisuke TAMURA |
| author_facet | Satomitsu IMAI Tadashi ISHIKAWA Masakazu SATO Hiroki SATO Keisuke TAMURA |
| author_sort | Satomitsu IMAI |
| collection | DOAJ |
| description | Methods for enhancing the gripping ability of microtweezers are examined in terms of friction force. Two aspects are investigated experimentally. One is a method for increasing the coefficient of friction of the handling part of the microtweezers. We examined the effect of the etching time on the surface roughness of surfaces processed by the Bosch process and the coefficient of friction. The coefficient of friction increased with increasing etching time. The other aspect we investigated is the optimum handling force. In tweezers-based handling, it is not clear whether the friction force is proportional to the handling force in accordance with Coulomb's law of friction. We performed measurements and found that the friction force is approximately proportional to the handling force. Using this knowledge, the optimum handling force can easily be determined. |
| first_indexed | 2024-12-11T02:06:44Z |
| format | Article |
| id | doaj.art-c3272b0d237b4b7f94a4b609eb3e4acc |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-12-11T02:06:44Z |
| publishDate | 2010-02-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-c3272b0d237b4b7f94a4b609eb3e4acc2022-12-22T01:24:22ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542010-02-014115015710.1299/jamdsm.4.150jamdsmHandling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-RieSatomitsu IMAI0Tadashi ISHIKAWA1Masakazu SATO2Hiroki SATO3Keisuke TAMURA4College of Science and Technology, Department of Precision Engineering, Nihon UniversityCollege of Science and Technology, Department of Precision Engineering, Nihon UniversityCollege of Science and Technology, Department of Precision Engineering, Nihon UniversityCollege of Science and Technology, Department of Precision Engineering, Nihon UniversityCollege of Science and Technology, Department of Precision Engineering, Nihon UniversityMethods for enhancing the gripping ability of microtweezers are examined in terms of friction force. Two aspects are investigated experimentally. One is a method for increasing the coefficient of friction of the handling part of the microtweezers. We examined the effect of the etching time on the surface roughness of surfaces processed by the Bosch process and the coefficient of friction. The coefficient of friction increased with increasing etching time. The other aspect we investigated is the optimum handling force. In tweezers-based handling, it is not clear whether the friction force is proportional to the handling force in accordance with Coulomb's law of friction. We performed measurements and found that the friction force is approximately proportional to the handling force. Using this knowledge, the optimum handling force can easily be determined.https://www.jstage.jst.go.jp/article/jamdsm/4/1/4_1_150/_pdf/-char/enmicro-mechanicshandling systemfrictionsurface roughnessdeep-riebosch process |
| spellingShingle | Satomitsu IMAI Tadashi ISHIKAWA Masakazu SATO Hiroki SATO Keisuke TAMURA Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie Journal of Advanced Mechanical Design, Systems, and Manufacturing micro-mechanics handling system friction surface roughness deep-rie bosch process |
| title | Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie |
| title_full | Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie |
| title_fullStr | Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie |
| title_full_unstemmed | Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie |
| title_short | Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie |
| title_sort | handling characteristics of mems tweezers with contact surface fabricated by deep rie |
| topic | micro-mechanics handling system friction surface roughness deep-rie bosch process |
| url | https://www.jstage.jst.go.jp/article/jamdsm/4/1/4_1_150/_pdf/-char/en |
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