Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie
Methods for enhancing the gripping ability of microtweezers are examined in terms of friction force. Two aspects are investigated experimentally. One is a method for increasing the coefficient of friction of the handling part of the microtweezers. We examined the effect of the etching time on the su...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2010-02-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/4/1/4_1_150/_pdf/-char/en |