Static temperature analysis and compensation of MEMS gyroscopes
MEMS gyroscopes as a kind of angular rate sensor have been widely used, but their accuracy tends to be low in practical applications, especially under temperature influence, and they generally require error compensation. Based on the analysis of gyroscope operating prin...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2013-01-01
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| Series: | International Journal of Metrology and Quality Engineering |
| Subjects: | |
| Online Access: | https://doi.org/10.1051/ijmqe/2013059 |
| Summary: | MEMS gyroscopes as a kind of angular rate sensor have been widely used, but their
accuracy tends to be low in practical applications, especially under temperature
influence, and they generally require error compensation. Based on the analysis of
gyroscope operating principle, this paper has shown that the resonant frequency and
measuring precision of the gyroscope are dependent on temperature and temperature
gradients. The paper has thus proposed a compensation model based on temperature and
temperature gradients. The experimental results have demonstrated that the thermal drift
of zero bias can be effectively suppressed, and the accuracy can be improved by one order
of magnitude after compensation. Compared with compensation methods only based on
temperature, the new method gives significantly better performance. The new error
compensation model has not only integrated the differences under different temperature
conditions, but also reduced the repeatability errors. It provides a theoretical basis for
accurate compensation of the gyroscope thermal error in practical applications and is
applicable to other MEMS gyroscopes. |
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| ISSN: | 2107-6839 2107-6847 |