Static temperature analysis and compensation of MEMS gyroscopes

Static temperature analysis and compensation of MEMS gyroscopes

MEMS gyroscopes as a kind of angular rate sensor have been widely used, but their accuracy tends to be low in practical applications, especially under temperature influence, and they generally require error compensation. Based on the analysis of gyroscope operating prin...

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Bibliographic Details
Main Authors: Tang Q.J., Wang X.J., Yang Q.P., Liu C.Z.
Format: Article
Language:English
Published: EDP Sciences 2013-01-01
Series:International Journal of Metrology and Quality Engineering
Subjects:
MEMS gyroscope
temperature gradients
zero bias compensation
temperature characteristics
Online Access:https://doi.org/10.1051/ijmqe/2013059

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