Displacement Analysis of the MEMS Device
In this study, the displacement analysis of the microelectromechanical system (MEMS) device was performed. The current passing through the microdevice radiates heat energy as it pushes the device to the desired distance through thermal expansion. The amount of expansion varies depending on the curre...
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| Format: | Article |
| Language: | English |
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The Netherlands Press
2020-09-01
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| Series: | Metallurgical & Materials Engineering |
| Subjects: | |
| Online Access: | https://metall-mater-eng.com/index.php/home/article/view/504 |
| _version_ | 1797963104920797184 |
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| author | Ishak Ertugrul |
| author_facet | Ishak Ertugrul |
| author_sort | Ishak Ertugrul |
| collection | DOAJ |
| description | In this study, the displacement analysis of the microelectromechanical system (MEMS) device was performed. The current passing through the microdevice radiates heat energy as it pushes the device to the desired distance through thermal expansion. The amount of expansion varies depending on the current flowing through the device. With the designed model, the amount of current required for the displacement of the MEMS device is determined. In addition, the displacements produced in the microdevice for different metallic materials (silver and gold) and input potentials (0.4 V, 0.8 V, and 1.2 V) were calculated. These types of materials are frequently preferred in MEMS technology due to their high conductivity. Increasing the voltage value as a result of the analysis studies increased the displacement of the materials. When 1.2 V voltage is applied, the highest displacement values for silver and gold are; 6.45 μm, 4.32 μm, respectively. According to the results, the silver material showed a significant displacement compared to gold material. |
| first_indexed | 2024-04-11T01:24:10Z |
| format | Article |
| id | doaj.art-c388787f351e43d4a985a4f5aedcb3aa |
| institution | Directory Open Access Journal |
| issn | 2217-8961 |
| language | English |
| last_indexed | 2024-04-11T01:24:10Z |
| publishDate | 2020-09-01 |
| publisher | The Netherlands Press |
| record_format | Article |
| series | Metallurgical & Materials Engineering |
| spelling | doaj.art-c388787f351e43d4a985a4f5aedcb3aa2023-01-03T10:52:50ZengThe Netherlands PressMetallurgical & Materials Engineering2217-89612020-09-0127217117610.30544/504504Displacement Analysis of the MEMS DeviceIshak Ertugrul0Mus Alparslan University, Faculty of Technical Science, Department of Mechatronics, Mus, 49100, TurkeyIn this study, the displacement analysis of the microelectromechanical system (MEMS) device was performed. The current passing through the microdevice radiates heat energy as it pushes the device to the desired distance through thermal expansion. The amount of expansion varies depending on the current flowing through the device. With the designed model, the amount of current required for the displacement of the MEMS device is determined. In addition, the displacements produced in the microdevice for different metallic materials (silver and gold) and input potentials (0.4 V, 0.8 V, and 1.2 V) were calculated. These types of materials are frequently preferred in MEMS technology due to their high conductivity. Increasing the voltage value as a result of the analysis studies increased the displacement of the materials. When 1.2 V voltage is applied, the highest displacement values for silver and gold are; 6.45 μm, 4.32 μm, respectively. According to the results, the silver material showed a significant displacement compared to gold material.https://metall-mater-eng.com/index.php/home/article/view/504mems; displacement; metallic materials; current. |
| spellingShingle | Ishak Ertugrul Displacement Analysis of the MEMS Device Metallurgical & Materials Engineering mems; displacement; metallic materials; current. |
| title | Displacement Analysis of the MEMS Device |
| title_full | Displacement Analysis of the MEMS Device |
| title_fullStr | Displacement Analysis of the MEMS Device |
| title_full_unstemmed | Displacement Analysis of the MEMS Device |
| title_short | Displacement Analysis of the MEMS Device |
| title_sort | displacement analysis of the mems device |
| topic | mems; displacement; metallic materials; current. |
| url | https://metall-mater-eng.com/index.php/home/article/view/504 |
| work_keys_str_mv | AT ishakertugrul displacementanalysisofthememsdevice |