Displacement Analysis of the MEMS Device
In this study, the displacement analysis of the microelectromechanical system (MEMS) device was performed. The current passing through the microdevice radiates heat energy as it pushes the device to the desired distance through thermal expansion. The amount of expansion varies depending on the curre...
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| Format: | Article |
| Language: | English |
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The Netherlands Press
2020-09-01
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| Series: | Metallurgical & Materials Engineering |
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| Online Access: | https://metall-mater-eng.com/index.php/home/article/view/504 |