A Review on Precision Polishing Technology of Single-Crystal SiC

A Review on Precision Polishing Technology of Single-Crystal SiC

Single-crystal SiC is a typical third-generation semiconductor power-device material because of its excellent electronic and thermal properties. An ultrasmooth surface with atomic surface roughness that is scratch free and subsurface damage (SSD) free is indispensable before its application. As the...

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Bibliographic Details
Main Authors: Gaoling Ma, Shujuan Li, Feilong Liu, Chen Zhang, Zhen Jia, Xincheng Yin
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Crystals
Subjects:
single-crystal SiC
precision polishing
material removal rate (MRR)
surface roughness
Online Access:https://www.mdpi.com/2073-4352/12/1/101

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