Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash
A macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision testing and machining, etc. Aiming at the ultra-high-pre...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-11-01
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| Series: | Machines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1702/11/12/1044 |
| _version_ | 1827574296944312320 |
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| author | Shuo Kang Buyang Zhang Xing Huang Rijin Zhong Shengzhao Huang |
| author_facet | Shuo Kang Buyang Zhang Xing Huang Rijin Zhong Shengzhao Huang |
| author_sort | Shuo Kang |
| collection | DOAJ |
| description | A macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision testing and machining, etc. Aiming at the ultra-high-precision positioning control problem of macro–micro dual-drive systems containing mechanical backlash, this paper analyzes the combined effect of mechanical coupling and backlash, and proposes a macro–micro compound control strategy. Firstly, the system dynamic model, including mechanical coupling, is established, and a quasi-linear backlash model is also proposed. Secondly, based on the above model, a stepwise nonlinear identification method is proposed to obtain the backlash characteristic online, which is the basis of accurate backlash compensation. Then, for the macro–micro structure containing the backlash, a macro decoupling control method, combined with a micro adaptive integral sliding mode control method and backlash compensation, are designed coordinately to guarantee that the large-stroke macro–micro cooperative motion reaches micron-level accuracy. Moreover, the boundary of the positioning error is adjustable by tuning the controller parameters. Finally, both the simulation and experimental results demonstrate that the proposed identification method can estimate the time-varying backlash precisely in finite time, and the system positioning accuracy can achieve an average 20 μm with long stroke and backlash influence, which is much higher than that using the traditional method and provides theoretical guidance for high-precision positioning control of a class of dual-drive motion platform. |
| first_indexed | 2024-03-08T20:35:10Z |
| format | Article |
| id | doaj.art-c49d844f9e904eb4a5c7a59376ccfd01 |
| institution | Directory Open Access Journal |
| issn | 2075-1702 |
| language | English |
| last_indexed | 2024-03-08T20:35:10Z |
| publishDate | 2023-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Machines |
| spelling | doaj.art-c49d844f9e904eb4a5c7a59376ccfd012023-12-22T14:21:53ZengMDPI AGMachines2075-17022023-11-011112104410.3390/machines11121044Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical BacklashShuo Kang0Buyang Zhang1Xing Huang2Rijin Zhong3Shengzhao Huang4Ji Hua Laboratory, No.28 Huandao South Road, Guicheng Street, Nanhai District, Foshan 528200, ChinaJi Hua Laboratory, No.28 Huandao South Road, Guicheng Street, Nanhai District, Foshan 528200, ChinaJi Hua Laboratory, No.28 Huandao South Road, Guicheng Street, Nanhai District, Foshan 528200, ChinaJi Hua Laboratory, No.28 Huandao South Road, Guicheng Street, Nanhai District, Foshan 528200, ChinaJi Hua Laboratory, No.28 Huandao South Road, Guicheng Street, Nanhai District, Foshan 528200, ChinaA macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision testing and machining, etc. Aiming at the ultra-high-precision positioning control problem of macro–micro dual-drive systems containing mechanical backlash, this paper analyzes the combined effect of mechanical coupling and backlash, and proposes a macro–micro compound control strategy. Firstly, the system dynamic model, including mechanical coupling, is established, and a quasi-linear backlash model is also proposed. Secondly, based on the above model, a stepwise nonlinear identification method is proposed to obtain the backlash characteristic online, which is the basis of accurate backlash compensation. Then, for the macro–micro structure containing the backlash, a macro decoupling control method, combined with a micro adaptive integral sliding mode control method and backlash compensation, are designed coordinately to guarantee that the large-stroke macro–micro cooperative motion reaches micron-level accuracy. Moreover, the boundary of the positioning error is adjustable by tuning the controller parameters. Finally, both the simulation and experimental results demonstrate that the proposed identification method can estimate the time-varying backlash precisely in finite time, and the system positioning accuracy can achieve an average 20 μm with long stroke and backlash influence, which is much higher than that using the traditional method and provides theoretical guidance for high-precision positioning control of a class of dual-drive motion platform.https://www.mdpi.com/2075-1702/11/12/1044macro–micro dual-drive motion platformquasi-linear backlash modelstepwise nonlinear identificationdecoupling controladaptive integral sliding mode control |
| spellingShingle | Shuo Kang Buyang Zhang Xing Huang Rijin Zhong Shengzhao Huang Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash Machines macro–micro dual-drive motion platform quasi-linear backlash model stepwise nonlinear identification decoupling control adaptive integral sliding mode control |
| title | Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash |
| title_full | Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash |
| title_fullStr | Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash |
| title_full_unstemmed | Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash |
| title_short | Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash |
| title_sort | nonlinear identification and decoupling sliding mode control of macro micro dual drive motion platform with mechanical backlash |
| topic | macro–micro dual-drive motion platform quasi-linear backlash model stepwise nonlinear identification decoupling control adaptive integral sliding mode control |
| url | https://www.mdpi.com/2075-1702/11/12/1044 |
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