Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash

Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash

A macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision testing and machining, etc. Aiming at the ultra-high-pre...

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Bibliographic Details
Main Authors: Shuo Kang, Buyang Zhang, Xing Huang, Rijin Zhong, Shengzhao Huang
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Machines
Subjects:
macro–micro dual-drive motion platform
quasi-linear backlash model
stepwise nonlinear identification
decoupling control
adaptive integral sliding mode control
Online Access:https://www.mdpi.com/2075-1702/11/12/1044

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