Pre-Groove Development for Laser Cleaving of Brittle Materials by Using Micro-Lens
Thermal stress cleaving is a prospective technique for separating thin plates of brittle materials such as silicon, ceramic and glass. This study, deals with a new method which provide the initial fracture on the edge of workpiece. The initial fracture such as crack, scratch and groove is the starti...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2012-08-01
|
| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/6/6_841/_pdf/-char/en |
