Evaluation and Optimization of a MOEMS Active Focusing Device
In this paper we present a detailed evaluation of a micro-opto-electromechanical system (MOEMS) for active focusing which is realized using an electrostatically deformed thin silicon membrane. The evaluation is done using finite element methods and experimental characterization of the device behavio...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/2/172 |
| _version_ | 1797412120555421696 |
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| author | Ulrich Mescheder Michael Lootze Khaled Aljasem |
| author_facet | Ulrich Mescheder Michael Lootze Khaled Aljasem |
| author_sort | Ulrich Mescheder |
| collection | DOAJ |
| description | In this paper we present a detailed evaluation of a micro-opto-electromechanical system (MOEMS) for active focusing which is realized using an electrostatically deformed thin silicon membrane. The evaluation is done using finite element methods and experimental characterization of the device behavior. The devices are realized in silicon on insulator technology. The influence of internal stress especially resulting from the high compressive buried oxide (BOX) layer is evaluated. Additionally, the effect of stress gradients in the crystalline device layer and of high reflective coatings such as aluminum is discussed. The influence of variations of some important process steps on the device performance is quantified. Finally, practical properties such as focal length control, long-term stability, hysteresis and dynamical response are presented and evaluated. The evaluation proves that the proposed membrane focusing device is suitable for high performance imaging (wavefront errors between λ/5–λ/10) with a large aperture (5 mm). |
| first_indexed | 2024-03-09T04:56:32Z |
| format | Article |
| id | doaj.art-c5090355c57d4c4e93344a23f0ee2c7f |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T04:56:32Z |
| publishDate | 2021-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-c5090355c57d4c4e93344a23f0ee2c7f2023-12-03T13:04:50ZengMDPI AGMicromachines2072-666X2021-02-0112217210.3390/mi12020172Evaluation and Optimization of a MOEMS Active Focusing DeviceUlrich Mescheder0Michael Lootze1Khaled Aljasem2Department of Mechanical & Medical Engineering, Institute for Microsystems Technology (IMST), Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, GermanyDepartment of Mechanical & Medical Engineering, Institute for Microsystems Technology (IMST), Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, GermanyZ-LASER GmbH, Merzhauser Str. 134, 79100 Freiburg im Breisgau, GermanyIn this paper we present a detailed evaluation of a micro-opto-electromechanical system (MOEMS) for active focusing which is realized using an electrostatically deformed thin silicon membrane. The evaluation is done using finite element methods and experimental characterization of the device behavior. The devices are realized in silicon on insulator technology. The influence of internal stress especially resulting from the high compressive buried oxide (BOX) layer is evaluated. Additionally, the effect of stress gradients in the crystalline device layer and of high reflective coatings such as aluminum is discussed. The influence of variations of some important process steps on the device performance is quantified. Finally, practical properties such as focal length control, long-term stability, hysteresis and dynamical response are presented and evaluated. The evaluation proves that the proposed membrane focusing device is suitable for high performance imaging (wavefront errors between λ/5–λ/10) with a large aperture (5 mm).https://www.mdpi.com/2072-666X/12/2/172adaptive opticsMOEMSSOIelectrostatic actuationactive focusingthin film stress |
| spellingShingle | Ulrich Mescheder Michael Lootze Khaled Aljasem Evaluation and Optimization of a MOEMS Active Focusing Device Micromachines adaptive optics MOEMS SOI electrostatic actuation active focusing thin film stress |
| title | Evaluation and Optimization of a MOEMS Active Focusing Device |
| title_full | Evaluation and Optimization of a MOEMS Active Focusing Device |
| title_fullStr | Evaluation and Optimization of a MOEMS Active Focusing Device |
| title_full_unstemmed | Evaluation and Optimization of a MOEMS Active Focusing Device |
| title_short | Evaluation and Optimization of a MOEMS Active Focusing Device |
| title_sort | evaluation and optimization of a moems active focusing device |
| topic | adaptive optics MOEMS SOI electrostatic actuation active focusing thin film stress |
| url | https://www.mdpi.com/2072-666X/12/2/172 |
| work_keys_str_mv | AT ulrichmescheder evaluationandoptimizationofamoemsactivefocusingdevice AT michaellootze evaluationandoptimizationofamoemsactivefocusingdevice AT khaledaljasem evaluationandoptimizationofamoemsactivefocusingdevice |