Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes

A catalyst is essential for the controlled synthesis of single-walled carbon nanotubes (SWNTs) by chemical vapour deposition (CVD). However, it is difficult to observe these nanosized particles in their original forms and in a statistical manner, which has resulted in a vague understanding of the be...

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Main Authors: Rong Xiang, Shigeo Maruyama
Format: Article
Language:English
Published: The Royal Society 2018-01-01
Series:Royal Society Open Science
Subjects:
Online Access:https://royalsocietypublishing.org/doi/pdf/10.1098/rsos.180345
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author Rong Xiang
Shigeo Maruyama
author_facet Rong Xiang
Shigeo Maruyama
author_sort Rong Xiang
collection DOAJ
description A catalyst is essential for the controlled synthesis of single-walled carbon nanotubes (SWNTs) by chemical vapour deposition (CVD). However, it is difficult to observe these nanosized particles in their original forms and in a statistical manner, which has resulted in a vague understanding of the behaviours of these particles. We present a technique to solve this long-standing issue. The key is to have an MEMS fabricated suspended SiO2 layer, which is thick enough to support catalyst deposition and nanotube growth but thin enough to allow electron beams to transit. On a 20 nm SiO2 film, we confirm that catalyst can be observed at an atomic resolution, and the catalyst–SWNT junctions can also be routinely observed. As a demonstration of this technique, we revisited the behaviour of monometallic catalysts through a systematic investigation of the size, chemical state and crystal structure of particles before and after high-temperature CVD. The active catalyst is found to follow a tangential growth mode, while the inactive catalyst is divided into three mechanisms: size growth, metal loss and inappropriate precipitation. The latter two mechanisms were not possible to observe by previous techniques.
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spelling doaj.art-c51ef82dae1f4fdd97f928ea5380e1b72022-12-22T01:50:50ZengThe Royal SocietyRoyal Society Open Science2054-57032018-01-015810.1098/rsos.180345180345Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubesRong XiangShigeo MaruyamaA catalyst is essential for the controlled synthesis of single-walled carbon nanotubes (SWNTs) by chemical vapour deposition (CVD). However, it is difficult to observe these nanosized particles in their original forms and in a statistical manner, which has resulted in a vague understanding of the behaviours of these particles. We present a technique to solve this long-standing issue. The key is to have an MEMS fabricated suspended SiO2 layer, which is thick enough to support catalyst deposition and nanotube growth but thin enough to allow electron beams to transit. On a 20 nm SiO2 film, we confirm that catalyst can be observed at an atomic resolution, and the catalyst–SWNT junctions can also be routinely observed. As a demonstration of this technique, we revisited the behaviour of monometallic catalysts through a systematic investigation of the size, chemical state and crystal structure of particles before and after high-temperature CVD. The active catalyst is found to follow a tangential growth mode, while the inactive catalyst is divided into three mechanisms: size growth, metal loss and inappropriate precipitation. The latter two mechanisms were not possible to observe by previous techniques.https://royalsocietypublishing.org/doi/pdf/10.1098/rsos.180345single-walled carbon nanotubecatalysttransmission electron microscopy
spellingShingle Rong Xiang
Shigeo Maruyama
Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes
Royal Society Open Science
single-walled carbon nanotube
catalyst
transmission electron microscopy
title Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes
title_full Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes
title_fullStr Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes
title_full_unstemmed Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes
title_short Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes
title_sort revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single walled carbon nanotubes
topic single-walled carbon nanotube
catalyst
transmission electron microscopy
url https://royalsocietypublishing.org/doi/pdf/10.1098/rsos.180345
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