TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beam
The nanogrowth and nanofabrication of solid substances using an intense and focused electron beam are reviewed in terms of the application of scanning and transmission electron microscopy (SEM, TEM and STEM) to control the size, position and structure of nanomaterials. The first example discussed is...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2008-01-01
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| Series: | Science and Technology of Advanced Materials |
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| Online Access: | http://www.iop.org/EJ/abstract/1468-6996/9/1/014110 |
| _version_ | 1818040957006774272 |
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| author | Kazuo Furuya |
| author_facet | Kazuo Furuya |
| author_sort | Kazuo Furuya |
| collection | DOAJ |
| description | The nanogrowth and nanofabrication of solid substances using an intense and focused electron beam are reviewed in terms of the application of scanning and transmission electron microscopy (SEM, TEM and STEM) to control the size, position and structure of nanomaterials. The first example discussed is the growth of freestanding nanotrees on insulator substrates by TEM. The growth process of the nanotrees was observed in situ and analyzed by high-resolution TEM (HRTEM) and was mainly controlled by the intensity of the electron beam. The second example is position- and size-controlled nanofabrication by STEM using a focused electron beam. The diameters of the nanostructures grown ranged from 4 to 20 nm depending on the size of the electron beam. Magnetic nanostructures were also obtained using an iron-containing precursor gas, Fe(CO)5. The freestanding iron nanoantennas were examined by electron holography. The magnetic field was observed to leak from the nanostructure body which appeared to act as a 'nanomagnet'. The third example described is the effect of a vacuum on the size and growth process of fabricated nanodots containing W in an ultrahigh-vacuum field-emission TEM (UHV-FE-TEM). The size of the dots can be controlled by changing the dose of electrons and the partial pressure of the precursor. The smallest particle size obtained was about 1.5 nm in diameter, which is the smallest size reported using this method. Finally, the importance of a smaller probe and a higher electron-beam current with atomic resolution is emphasized and an attempt to develop an ultrahigh-vacuum spherical aberration corrected STEM (Cs-corrected STEM) at NIMS is reported. |
| first_indexed | 2024-12-10T08:22:46Z |
| format | Article |
| id | doaj.art-c57e275143f24ded976b39e85394d860 |
| institution | Directory Open Access Journal |
| issn | 1468-6996 1878-5514 |
| language | English |
| last_indexed | 2024-12-10T08:22:46Z |
| publishDate | 2008-01-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | Science and Technology of Advanced Materials |
| spelling | doaj.art-c57e275143f24ded976b39e85394d8602022-12-22T01:56:18ZengTaylor & Francis GroupScience and Technology of Advanced Materials1468-69961878-55142008-01-0191014110TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beamKazuo FuruyaThe nanogrowth and nanofabrication of solid substances using an intense and focused electron beam are reviewed in terms of the application of scanning and transmission electron microscopy (SEM, TEM and STEM) to control the size, position and structure of nanomaterials. The first example discussed is the growth of freestanding nanotrees on insulator substrates by TEM. The growth process of the nanotrees was observed in situ and analyzed by high-resolution TEM (HRTEM) and was mainly controlled by the intensity of the electron beam. The second example is position- and size-controlled nanofabrication by STEM using a focused electron beam. The diameters of the nanostructures grown ranged from 4 to 20 nm depending on the size of the electron beam. Magnetic nanostructures were also obtained using an iron-containing precursor gas, Fe(CO)5. The freestanding iron nanoantennas were examined by electron holography. The magnetic field was observed to leak from the nanostructure body which appeared to act as a 'nanomagnet'. The third example described is the effect of a vacuum on the size and growth process of fabricated nanodots containing W in an ultrahigh-vacuum field-emission TEM (UHV-FE-TEM). The size of the dots can be controlled by changing the dose of electrons and the partial pressure of the precursor. The smallest particle size obtained was about 1.5 nm in diameter, which is the smallest size reported using this method. Finally, the importance of a smaller probe and a higher electron-beam current with atomic resolution is emphasized and an attempt to develop an ultrahigh-vacuum spherical aberration corrected STEM (Cs-corrected STEM) at NIMS is reported.http://www.iop.org/EJ/abstract/1468-6996/9/1/014110electron-beam-induced depositioniron carbonylnanorodelectron holographyultrahigh vacuumCs correctorscanning transmission electron microscopy |
| spellingShingle | Kazuo Furuya TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beam Science and Technology of Advanced Materials electron-beam-induced deposition iron carbonyl nanorod electron holography ultrahigh vacuum Cs corrector scanning transmission electron microscopy |
| title | TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beam |
| title_full | TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beam |
| title_fullStr | TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beam |
| title_full_unstemmed | TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beam |
| title_short | TOPICAL REVIEW: Nanofabrication by advanced electron microscopy using intense and focused beam |
| title_sort | topical review nanofabrication by advanced electron microscopy using intense and focused beam |
| topic | electron-beam-induced deposition iron carbonyl nanorod electron holography ultrahigh vacuum Cs corrector scanning transmission electron microscopy |
| url | http://www.iop.org/EJ/abstract/1468-6996/9/1/014110 |
| work_keys_str_mv | AT kazuofuruya topicalreviewnanofabricationbyadvancedelectronmicroscopyusingintenseandfocusedbeam |