TEM sample preparation using micro-manipulator for in-situ MEMS experiment

Abstract Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we...

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Main Authors: Hyunjong Lee, Odongo Francis Ngome Okello, Gi-Yeop Kim, Kyung Song, Si-Young Choi
Format: Article
Language:English
Published: SpringerOpen 2021-06-01
Series:Applied Microscopy
Subjects:
Online Access:https://doi.org/10.1186/s42649-021-00057-8
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author Hyunjong Lee
Odongo Francis Ngome Okello
Gi-Yeop Kim
Kyung Song
Si-Young Choi
author_facet Hyunjong Lee
Odongo Francis Ngome Okello
Gi-Yeop Kim
Kyung Song
Si-Young Choi
author_sort Hyunjong Lee
collection DOAJ
description Abstract Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.
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spelling doaj.art-c5c71514140740e6b3b5c4de4898dd1b2022-12-21T18:42:50ZengSpringerOpenApplied Microscopy2287-44452021-06-015111710.1186/s42649-021-00057-8TEM sample preparation using micro-manipulator for in-situ MEMS experimentHyunjong Lee0Odongo Francis Ngome Okello1Gi-Yeop Kim2Kyung Song3Si-Young Choi4Korea Institute of Industrial TechnologyDepartment of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)Division of Materials Testing and Reliability, Korea Institute of Materials ScienceDepartment of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)Abstract Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.https://doi.org/10.1186/s42649-021-00057-8ManipulatorMEMSIn-situ transmission electron microscopy
spellingShingle Hyunjong Lee
Odongo Francis Ngome Okello
Gi-Yeop Kim
Kyung Song
Si-Young Choi
TEM sample preparation using micro-manipulator for in-situ MEMS experiment
Applied Microscopy
Manipulator
MEMS
In-situ transmission electron microscopy
title TEM sample preparation using micro-manipulator for in-situ MEMS experiment
title_full TEM sample preparation using micro-manipulator for in-situ MEMS experiment
title_fullStr TEM sample preparation using micro-manipulator for in-situ MEMS experiment
title_full_unstemmed TEM sample preparation using micro-manipulator for in-situ MEMS experiment
title_short TEM sample preparation using micro-manipulator for in-situ MEMS experiment
title_sort tem sample preparation using micro manipulator for in situ mems experiment
topic Manipulator
MEMS
In-situ transmission electron microscopy
url https://doi.org/10.1186/s42649-021-00057-8
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