A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio

A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio

This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz...

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Hlavní autoři: Fatemeh Gholami, Andy Shih, Alexandre Robichaud, Paul-Vahe Cicek
Médium: Článek
Jazyk:English
Vydáno: MDPI AG 2022-08-01
Edice:Sensors
Témata:
lamb wave
mass sensing
microsensor
metalization ratio
CMOS
THD
On-line přístup:https://www.mdpi.com/1424-8220/22/17/6428

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https://www.mdpi.com/1424-8220/22/17/6428

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