Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison

A comparative analysis was performed of fluorine-doped tin oxide (FTO) thin films deposited through two different systems: pneumatic spray pyrolysis and ultrasonic spray pyrolysis. The films were deposited on glass substrates at 460 °C, with varying weight ratios of fluorine to tin (F/Sn = 0.35, F/S...

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Main Authors: Raquel Ramírez-Amador, José Joaquín Alvarado-Pulido, Haydee Patricia Martínez-Hernández, Raúl Cortes- Maldonado, Salvador Alcántara-Iniesta, Gregorio Flores-Carrasco, Esteban Ojeda-Durán, Oleksandr Malik, Leonardo Morales-de la Garza, Miguel Ángel Méndez-Rojas, Yesmin Panecatl-Bernal, José Alberto Luna-López, Primavera López-Salazar
Format: Article
Language:English
Published: IOP Publishing 2023-01-01
Series:Materials Research Express
Subjects:
Online Access:https://doi.org/10.1088/2053-1591/acda1a
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author Raquel Ramírez-Amador
José Joaquín Alvarado-Pulido
Haydee Patricia Martínez-Hernández
Raúl Cortes- Maldonado
Salvador Alcántara-Iniesta
Gregorio Flores-Carrasco
Esteban Ojeda-Durán
Oleksandr Malik
Leonardo Morales-de la Garza
Miguel Ángel Méndez-Rojas
Yesmin Panecatl-Bernal
José Alberto Luna-López
Primavera López-Salazar
author_facet Raquel Ramírez-Amador
José Joaquín Alvarado-Pulido
Haydee Patricia Martínez-Hernández
Raúl Cortes- Maldonado
Salvador Alcántara-Iniesta
Gregorio Flores-Carrasco
Esteban Ojeda-Durán
Oleksandr Malik
Leonardo Morales-de la Garza
Miguel Ángel Méndez-Rojas
Yesmin Panecatl-Bernal
José Alberto Luna-López
Primavera López-Salazar
author_sort Raquel Ramírez-Amador
collection DOAJ
description A comparative analysis was performed of fluorine-doped tin oxide (FTO) thin films deposited through two different systems: pneumatic spray pyrolysis and ultrasonic spray pyrolysis. The films were deposited on glass substrates at 460 °C, with varying weight ratios of fluorine to tin (F/Sn = 0.35, F/Sn = 0.50, and F/Sn = 0.65). The investigation focuses on the evolution of the film’s crystallinity, structural, morphological, transmittance, optical, and electrical properties. Resonant nuclear reaction (RNR) and energy dispersive spectroscopy (EDS) techniques were used to confirm the presence of fluorine in the FTO samples. The results show that the sample with F/Sn = 0.50 deposited through pneumatic spray pyrolysis, with a figure of merit of 34.5 × 10 ^−3 Ω ^−1 , exhibits the best characteristics for use as electrodes in optoelectronic devices, particularly in the fabrication of solar cells.
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spelling doaj.art-c646272034ce47c9ab4a8e6705a666a32023-08-09T16:11:21ZengIOP PublishingMaterials Research Express2053-15912023-01-0110606640210.1088/2053-1591/acda1aStudy of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparisonRaquel Ramírez-Amador0https://orcid.org/0000-0003-0716-4596José Joaquín Alvarado-Pulido1https://orcid.org/0000-0001-7186-4429Haydee Patricia Martínez-Hernández2Raúl Cortes- Maldonado3Salvador Alcántara-Iniesta4Gregorio Flores-Carrasco5https://orcid.org/0000-0002-0204-0589Esteban Ojeda-Durán6https://orcid.org/0000-0002-4872-9170Oleksandr Malik7Leonardo Morales-de la Garza8https://orcid.org/0000-0002-6402-5456Miguel Ángel Méndez-Rojas9https://orcid.org/0000-0002-4758-3763Yesmin Panecatl-Bernal10José Alberto Luna-López11https://orcid.org/0000-0002-7647-3184Primavera López-Salazar12División de Carrera de Mecatrónica, Universidad Tecnológica de Huejotzingo (UTH) , Camino Real a San Mateo 36B, Segunad Sección, Santa Ana Xalmimilulco, 74169 Puebla, Mexico; Centro de Investigaciones en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP) , Col. San Manuel, Cd. Universitaria, Av. San Claudio y 14 Sur, Edificios IC5 y IC6, Puebla 72570, MexicoCentro de Investigaciones en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP) , Col. San Manuel, Cd. Universitaria, Av. San Claudio y 14 Sur, Edificios IC5 y IC6, Puebla 72570, MexicoDepartamento de Ingeniería Eléctrica y Electrónica, Tecnológico Nacional de México/Instituto Tecnológico de Apizaco, Carretera Apizaco-Tzompantepec, esq. con Av. Instituto Tecnológico S/N, Conurbado Apizaco-Tzompantepec, Tlaxcala 90300, MexicoDepartamento de Ingeniería Eléctrica y Electrónica, Tecnológico Nacional de México/Instituto Tecnológico de Apizaco, Carretera Apizaco-Tzompantepec, esq. con Av. Instituto Tecnológico S/N, Conurbado Apizaco-Tzompantepec, Tlaxcala 90300, MexicoCentro de Investigaciones en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP) , Col. San Manuel, Cd. Universitaria, Av. San Claudio y 14 Sur, Edificios IC5 y IC6, Puebla 72570, MexicoTecnoloógico Nacional de México ITS/Tepeaca, Tepeaca 75219, Puebla, MexicoCentro de Investigaciones en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP) , Col. San Manuel, Cd. Universitaria, Av. San Claudio y 14 Sur, Edificios IC5 y IC6, Puebla 72570, MexicoDepartamento de Electrónica, Instituto Nacional de Astrofísica, Óptica y Electrónica INAOE), Puebla 72000, MexicoCentro de Nanociencia y Nanotecnología, Carretera Tijuana-Ensenada km107, Ensenada, B.C.22860, MexicoUniversidad de las Américas Puebla . Ex-hacienda Sta. Catarina Mártir S/N. San Andrés Cholula, Puebla, 72810, MexicoCentro de Investigaciones en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP) , Col. San Manuel, Cd. Universitaria, Av. San Claudio y 14 Sur, Edificios IC5 y IC6, Puebla 72570, MexicoCentro de Investigaciones en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP) , Col. San Manuel, Cd. Universitaria, Av. San Claudio y 14 Sur, Edificios IC5 y IC6, Puebla 72570, MexicoCentro de Investigaciones en Dispositivos Semiconductores (CIDS-ICUAP), Benemérita Universidad Autónoma de Puebla (BUAP) , Col. San Manuel, Cd. Universitaria, Av. San Claudio y 14 Sur, Edificios IC5 y IC6, Puebla 72570, MexicoA comparative analysis was performed of fluorine-doped tin oxide (FTO) thin films deposited through two different systems: pneumatic spray pyrolysis and ultrasonic spray pyrolysis. The films were deposited on glass substrates at 460 °C, with varying weight ratios of fluorine to tin (F/Sn = 0.35, F/Sn = 0.50, and F/Sn = 0.65). The investigation focuses on the evolution of the film’s crystallinity, structural, morphological, transmittance, optical, and electrical properties. Resonant nuclear reaction (RNR) and energy dispersive spectroscopy (EDS) techniques were used to confirm the presence of fluorine in the FTO samples. The results show that the sample with F/Sn = 0.50 deposited through pneumatic spray pyrolysis, with a figure of merit of 34.5 × 10 ^−3 Ω ^−1 , exhibits the best characteristics for use as electrodes in optoelectronic devices, particularly in the fabrication of solar cells.https://doi.org/10.1088/2053-1591/acda1afluorine tin oxidethin filmspneumatic spray pyrolysisspray pyrolysis ultrasonic
spellingShingle Raquel Ramírez-Amador
José Joaquín Alvarado-Pulido
Haydee Patricia Martínez-Hernández
Raúl Cortes- Maldonado
Salvador Alcántara-Iniesta
Gregorio Flores-Carrasco
Esteban Ojeda-Durán
Oleksandr Malik
Leonardo Morales-de la Garza
Miguel Ángel Méndez-Rojas
Yesmin Panecatl-Bernal
José Alberto Luna-López
Primavera López-Salazar
Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison
Materials Research Express
fluorine tin oxide
thin films
pneumatic spray pyrolysis
spray pyrolysis ultrasonic
title Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison
title_full Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison
title_fullStr Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison
title_full_unstemmed Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison
title_short Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison
title_sort study of fluorine doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis a direct comparison
topic fluorine tin oxide
thin films
pneumatic spray pyrolysis
spray pyrolysis ultrasonic
url https://doi.org/10.1088/2053-1591/acda1a
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