High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps
In this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. By optimizing the...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-01-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/2/1040 |
| _version_ | 1797437193630777344 |
|---|---|
| author | Yuichi Kurashima Taisei Motomura Shinya Yanagimachi Takashi Matsumae Mitsuhiro Watanabe Hideki Takagi |
| author_facet | Yuichi Kurashima Taisei Motomura Shinya Yanagimachi Takashi Matsumae Mitsuhiro Watanabe Hideki Takagi |
| author_sort | Yuichi Kurashima |
| collection | DOAJ |
| description | In this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. By optimizing the distance between two opposing permanent magnets and size of these magnets, a magnetic mirror ratio value of 27 could be obtained, which is an electron confinement efficiency of over 90%. We also conducted an experiment on a high-efficiency discharge plasma source for a miniature ion pump using an optimized magnetic circuit. As a result, we revealed that the proposed magnetic circuit has a pronounced effect on plasma generation, particularly in the high-vacuum region. |
| first_indexed | 2024-03-09T11:16:17Z |
| format | Article |
| id | doaj.art-c647146be6b84a1e906750abba97783c |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T11:16:17Z |
| publishDate | 2023-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-c647146be6b84a1e906750abba97783c2023-12-01T00:31:44ZengMDPI AGSensors1424-82202023-01-01232104010.3390/s23021040High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion PumpsYuichi Kurashima0Taisei Motomura1Shinya Yanagimachi2Takashi Matsumae3Mitsuhiro Watanabe4Hideki Takagi5Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8564, JapanSensing System Research Center, National Institute of Advanced Industrial Science and Technology, Saga 841-0052, JapanResearch Institute for Physical Measurement, National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8563, JapanDevice Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8564, JapanCollege of Science and Technology, Nihon University, Chiba 274-8501, JapanDevice Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8564, JapanIn this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. By optimizing the distance between two opposing permanent magnets and size of these magnets, a magnetic mirror ratio value of 27 could be obtained, which is an electron confinement efficiency of over 90%. We also conducted an experiment on a high-efficiency discharge plasma source for a miniature ion pump using an optimized magnetic circuit. As a result, we revealed that the proposed magnetic circuit has a pronounced effect on plasma generation, particularly in the high-vacuum region.https://www.mdpi.com/1424-8220/23/2/1040miniature ion pumpultra-high vacuumanodic bondinglaser cooling atom |
| spellingShingle | Yuichi Kurashima Taisei Motomura Shinya Yanagimachi Takashi Matsumae Mitsuhiro Watanabe Hideki Takagi High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps Sensors miniature ion pump ultra-high vacuum anodic bonding laser cooling atom |
| title | High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps |
| title_full | High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps |
| title_fullStr | High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps |
| title_full_unstemmed | High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps |
| title_short | High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps |
| title_sort | high efficiency plasma source using a magnetic mirror trap for miniature ion pumps |
| topic | miniature ion pump ultra-high vacuum anodic bonding laser cooling atom |
| url | https://www.mdpi.com/1424-8220/23/2/1040 |
| work_keys_str_mv | AT yuichikurashima highefficiencyplasmasourceusingamagneticmirrortrapforminiatureionpumps AT taiseimotomura highefficiencyplasmasourceusingamagneticmirrortrapforminiatureionpumps AT shinyayanagimachi highefficiencyplasmasourceusingamagneticmirrortrapforminiatureionpumps AT takashimatsumae highefficiencyplasmasourceusingamagneticmirrortrapforminiatureionpumps AT mitsuhirowatanabe highefficiencyplasmasourceusingamagneticmirrortrapforminiatureionpumps AT hidekitakagi highefficiencyplasmasourceusingamagneticmirrortrapforminiatureionpumps |