SnO2/Pt Thin Film Laser Ablated Gas Sensor Array
A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing an...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2011-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/11/8/7724/ |
| _version_ | 1828146610537758720 |
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| author | Rahman Wagiran Norhafizah Abdullah Abdul Halim Shaari Mohd Nizar Hamidon Mohammad Hadi Shahrokh Abadi |
| author_facet | Rahman Wagiran Norhafizah Abdullah Abdul Halim Shaari Mohd Nizar Hamidon Mohammad Hadi Shahrokh Abadi |
| author_sort | Rahman Wagiran |
| collection | DOAJ |
| description | A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times. |
| first_indexed | 2024-04-11T20:49:26Z |
| format | Article |
| id | doaj.art-c6abf6340c974dc7821be5eb88884f3d |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T20:49:26Z |
| publishDate | 2011-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-c6abf6340c974dc7821be5eb88884f3d2022-12-22T04:03:53ZengMDPI AGSensors1424-82202011-08-011187724773510.3390/s110807724SnO2/Pt Thin Film Laser Ablated Gas Sensor ArrayRahman WagiranNorhafizah AbdullahAbdul Halim ShaariMohd Nizar HamidonMohammad Hadi Shahrokh AbadiA gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times.http://www.mdpi.com/1424-8220/11/8/7724/gas sensorthin filmpulse laser ablation depositionscreen printingtin oxideplatinum |
| spellingShingle | Rahman Wagiran Norhafizah Abdullah Abdul Halim Shaari Mohd Nizar Hamidon Mohammad Hadi Shahrokh Abadi SnO2/Pt Thin Film Laser Ablated Gas Sensor Array Sensors gas sensor thin film pulse laser ablation deposition screen printing tin oxide platinum |
| title | SnO2/Pt Thin Film Laser Ablated Gas Sensor Array |
| title_full | SnO2/Pt Thin Film Laser Ablated Gas Sensor Array |
| title_fullStr | SnO2/Pt Thin Film Laser Ablated Gas Sensor Array |
| title_full_unstemmed | SnO2/Pt Thin Film Laser Ablated Gas Sensor Array |
| title_short | SnO2/Pt Thin Film Laser Ablated Gas Sensor Array |
| title_sort | sno2 pt thin film laser ablated gas sensor array |
| topic | gas sensor thin film pulse laser ablation deposition screen printing tin oxide platinum |
| url | http://www.mdpi.com/1424-8220/11/8/7724/ |
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