Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming

Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming

This study reports an oven-controlled microelectromechanical systems oscillator with integrated micro-evaporation trimming that achieves frequency stability over the industrial temperature range and permanent frequency trimming after vacuum packaging. The length-extensional-mode resonator is micro-o...

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Bibliographic Details
Main Authors: Binbin Pei, Ke Sun, Heng Yang, Chaozhan Ye, Peng Zhong, Tingting Yu, Xinxin Li
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Sensors
Subjects:
frequency trimming
integrated micro-evaporation trimming
oven-controlled MEMS oscillator
Online Access:https://www.mdpi.com/1424-8220/20/8/2373

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