A virtual microscope for simulation of Nanostructures
Light-matter interplay is widely used for analyzing the topology of surfaces on small scales for use in areas such as nanotechnology, nanoelectronics, photonics, and advanced materials. Conventional optical microscope imaging methods are limited in resolution to a value comparable to the wavelength,...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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EDP Sciences
2022-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_10004.pdf |
| _version_ | 1811344526299627520 |
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| author | Hansen Poul-Erik Siaudinyte Lauryna |
| author_facet | Hansen Poul-Erik Siaudinyte Lauryna |
| author_sort | Hansen Poul-Erik |
| collection | DOAJ |
| description | Light-matter interplay is widely used for analyzing the topology of surfaces on small scales for use in areas such as nanotechnology, nanoelectronics, photonics, and advanced materials. Conventional optical microscope imaging methods are limited in resolution to a value comparable to the wavelength, the so-called Abbe limit, and cannot be used to measure nano-sized structures. Scatterometry is an optical method that can measure structures smaller than the wavelength. However, the relative uncertainties of the structure dimensions measured with scatterometry increase with decreasing structure size, and the industry is therefore looking for replacing simple intensity based scatterometry with a phase-sensitive measurement method such as coherent Mueller ellipsometry. In this work, we present a virtual microscope capable of simulating the coherent Mueller ellipsometry and scatterometry response from one-dimensional and two-dimensional periodic structures. Furthermore, we argue that coherent nonnormalized Mueller ellipsometry gives results with less uncertainties than standard normalized Mueller ellipsometry. |
| first_indexed | 2024-04-13T19:48:35Z |
| format | Article |
| id | doaj.art-c7f443ad58684befacdd0f8af8e4bbae |
| institution | Directory Open Access Journal |
| issn | 2100-014X |
| language | English |
| last_indexed | 2024-04-13T19:48:35Z |
| publishDate | 2022-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | EPJ Web of Conferences |
| spelling | doaj.art-c7f443ad58684befacdd0f8af8e4bbae2022-12-22T02:32:38ZengEDP SciencesEPJ Web of Conferences2100-014X2022-01-012661000410.1051/epjconf/202226610004epjconf_eosam2022_10004A virtual microscope for simulation of NanostructuresHansen Poul-Erik0Siaudinyte Lauryna1Danish Fundamental Metrology A/SVSL – Dutch metrology instituteLight-matter interplay is widely used for analyzing the topology of surfaces on small scales for use in areas such as nanotechnology, nanoelectronics, photonics, and advanced materials. Conventional optical microscope imaging methods are limited in resolution to a value comparable to the wavelength, the so-called Abbe limit, and cannot be used to measure nano-sized structures. Scatterometry is an optical method that can measure structures smaller than the wavelength. However, the relative uncertainties of the structure dimensions measured with scatterometry increase with decreasing structure size, and the industry is therefore looking for replacing simple intensity based scatterometry with a phase-sensitive measurement method such as coherent Mueller ellipsometry. In this work, we present a virtual microscope capable of simulating the coherent Mueller ellipsometry and scatterometry response from one-dimensional and two-dimensional periodic structures. Furthermore, we argue that coherent nonnormalized Mueller ellipsometry gives results with less uncertainties than standard normalized Mueller ellipsometry.https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_10004.pdf |
| spellingShingle | Hansen Poul-Erik Siaudinyte Lauryna A virtual microscope for simulation of Nanostructures EPJ Web of Conferences |
| title | A virtual microscope for simulation of Nanostructures |
| title_full | A virtual microscope for simulation of Nanostructures |
| title_fullStr | A virtual microscope for simulation of Nanostructures |
| title_full_unstemmed | A virtual microscope for simulation of Nanostructures |
| title_short | A virtual microscope for simulation of Nanostructures |
| title_sort | virtual microscope for simulation of nanostructures |
| url | https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_10004.pdf |
| work_keys_str_mv | AT hansenpoulerik avirtualmicroscopeforsimulationofnanostructures AT siaudinytelauryna avirtualmicroscopeforsimulationofnanostructures AT hansenpoulerik virtualmicroscopeforsimulationofnanostructures AT siaudinytelauryna virtualmicroscopeforsimulationofnanostructures |