Fabrication of AlGaN High Frequency Bulk Acoustic Resonator by Reactive RF Magnetron Co-sputtering System

Fabrication of AlGaN High Frequency Bulk Acoustic Resonator by Reactive RF Magnetron Co-sputtering System

In this study, aluminum gallium nitride (AlGaN) thin films are used as the piezoelectric layers to fabricate solidly mounted resonators (SMR) for high frequency acoustic wave devices. AlGaN film is deposited on a Bragg reflector, composed of three pairs of Mo and SiO<sub>2</sub> films, t...

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Bibliographic Details
Main Authors:	Yu-Chen Chang, Ying-Chung Chen, Chien-Chuan Cheng
Format:	Article
Language:	English
Published:	MDPI AG 2021-12-01
Series:	Materials
Subjects:	piezoelectric aluminum gallium nitride solidly mounted resonator frequency response
Online Access:	https://www.mdpi.com/1996-1944/14/23/7377

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