Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning
Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS sca...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/4/378 |
| _version_ | 1797539289816367104 |
|---|---|
| author | Qiang Wang Weimin Wang Xuye Zhuang Chongxi Zhou Bin Fan |
| author_facet | Qiang Wang Weimin Wang Xuye Zhuang Chongxi Zhou Bin Fan |
| author_sort | Qiang Wang |
| collection | DOAJ |
| description | Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS scanners. In this work, we propose a 2D electrostatically actuated micro raster scanner with relatively large aperture. The 2D scanner combines a resonant scanning axis driven by an in-plane comb and a quasistatic scanning axis driven by a vertical comb, which is achieved by raising the moving comb finger above the fixed comb finger through the residual stress gradient. The analytic formula for the resonant axis frequency, based on the mechanical coupling of two oscillation modes, is derived and compared with finite element simulation. A prototype is designed, fabricated, and tested, and an overall optical Field-of-View (FoV) of about 60° × 4° is achieved. Finally, some possibilities for further improvement or optimization are discussed. |
| first_indexed | 2024-03-10T12:43:51Z |
| format | Article |
| id | doaj.art-c8910c4343e443f09080595b8133e05f |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T12:43:51Z |
| publishDate | 2021-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-c8910c4343e443f09080595b8133e05f2023-11-21T13:42:46ZengMDPI AGMicromachines2072-666X2021-04-0112437810.3390/mi12040378Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster ScanningQiang Wang0Weimin Wang1Xuye Zhuang2Chongxi Zhou3Bin Fan4State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaKey Laboratory of Optoelectronic Technology and Systems, Ministry of Education & Defense Key Disciplines Laboratory of Novel Micro-Nano Devices and System Technology, Chongqing University, Chongqing 400044, ChinaSchool of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaState Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaState Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaMicroelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS scanners. In this work, we propose a 2D electrostatically actuated micro raster scanner with relatively large aperture. The 2D scanner combines a resonant scanning axis driven by an in-plane comb and a quasistatic scanning axis driven by a vertical comb, which is achieved by raising the moving comb finger above the fixed comb finger through the residual stress gradient. The analytic formula for the resonant axis frequency, based on the mechanical coupling of two oscillation modes, is derived and compared with finite element simulation. A prototype is designed, fabricated, and tested, and an overall optical Field-of-View (FoV) of about 60° × 4° is achieved. Finally, some possibilities for further improvement or optimization are discussed.https://www.mdpi.com/2072-666X/12/4/378two-dimensional raster scanningelectrostatic comb-drive actuatorvacuum operationmechanical couplingresidual stressin-phase |
| spellingShingle | Qiang Wang Weimin Wang Xuye Zhuang Chongxi Zhou Bin Fan Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning Micromachines two-dimensional raster scanning electrostatic comb-drive actuator vacuum operation mechanical coupling residual stress in-phase |
| title | Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning |
| title_full | Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning |
| title_fullStr | Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning |
| title_full_unstemmed | Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning |
| title_short | Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning |
| title_sort | development of an electrostatic comb driven mems scanning mirror for two dimensional raster scanning |
| topic | two-dimensional raster scanning electrostatic comb-drive actuator vacuum operation mechanical coupling residual stress in-phase |
| url | https://www.mdpi.com/2072-666X/12/4/378 |
| work_keys_str_mv | AT qiangwang developmentofanelectrostaticcombdrivenmemsscanningmirrorfortwodimensionalrasterscanning AT weiminwang developmentofanelectrostaticcombdrivenmemsscanningmirrorfortwodimensionalrasterscanning AT xuyezhuang developmentofanelectrostaticcombdrivenmemsscanningmirrorfortwodimensionalrasterscanning AT chongxizhou developmentofanelectrostaticcombdrivenmemsscanningmirrorfortwodimensionalrasterscanning AT binfan developmentofanelectrostaticcombdrivenmemsscanningmirrorfortwodimensionalrasterscanning |