Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditions

Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditions

Copper nitride shows various properties that depend on the structure of the material and is influenced by the change in technical parameters. In the present work, Cu–N layers were synthesized using the pulsed magnetron sputtering method. The synthesis was performed under different operating conditio...

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Bibliographic Details
Main Authors: Magdalena Wilczopolska, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Lukasz Skowronski, Roman Minikayev, Grzegorz W. Strzelecki, Rafal Chodun, Krzysztof Zdunek
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Materials
Subjects:
copper nitride
pulsed magnetron sputtering
plasma surface engineering method
Raman spectroscopy
optical properties
Online Access:https://www.mdpi.com/1996-1944/14/10/2694

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