Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (<i>Q</i>) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric exc...

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Bibliographic Details
Main Authors: Kai Wu, Kuo Lu, Qingsong Li, Yongmeng Zhang, Ming Zhuo, Sheng Yu, Xuezhong Wu, Dingbang Xiao
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
parametric excitation/amplification
quality factor
parametric resonance
subharmonic excitation
push-pull driving method
MEMS disk resonator gyroscope
Online Access:https://www.mdpi.com/2072-666X/12/1/61

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