AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection

AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing. However, the sensing distance of currently reported miniaturized ultrasonic sensors (e.g., PMUTs or CMUT) is still limited up to a certain range (e.g., ≤5 m) compared to conventional bulk ultraso...

Full description

Bibliographic Details
Main Authors: Haolin Yang, Meilin Ji, Xueying Xiu, Haochen Lv, Alex Gu, Songsong Zhang
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Micromachines
Subjects:
PMUT
AlScN
MEMS
long-range detection
ultrasound transducers
rangefinder
Online Access:https://www.mdpi.com/2072-666X/13/11/1942

Similar Items

Similar Items