Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance chang...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-06-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/7/649 |
| _version_ | 1797563749916213248 |
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| author | Joerg Froemel Satoru Akita Shuji Tanaka |
| author_facet | Joerg Froemel Satoru Akita Shuji Tanaka |
| author_sort | Joerg Froemel |
| collection | DOAJ |
| description | A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance change) was measured under pressure in a frequency band from 5 to 500 MHz. A lumped-element equivalent electric circuit was used to separate the impedance of the soft magnetic metal from other parasitic elements. The impedance change clearly depended on the applied pressure. It was also shown that the impedance change could be explained by a change in relative permeability, according to the theory of the SI effect. The radial stress in the diaphragm and the relative permeability exhibited a linear relationship. At a measurement frequency of 200 MHz, the largest sensor response, with a gauge factor of 385.7, was found. It was in the same order as the conventional sensors. As the proposed device is very simple, it has the potential for application as a cheap pressure sensor. |
| first_indexed | 2024-03-10T18:47:48Z |
| format | Article |
| id | doaj.art-c9bb6d048bf34935ae2149be826697cf |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T18:47:48Z |
| publishDate | 2020-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-c9bb6d048bf34935ae2149be826697cf2023-11-20T05:23:42ZengMDPI AGMicromachines2072-666X2020-06-0111764910.3390/mi11070649Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin FilmJoerg Froemel0Satoru Akita1Shuji Tanaka2Advanced Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JapanDepartment of Robotics, Tohoku University, 6-6-01, Aza Aoba, Aramaki Aoba-ku, Sendai 980-8579, JapanDepartment of Robotics, Tohoku University, 6-6-01, Aza Aoba, Aramaki Aoba-ku, Sendai 980-8579, JapanA simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance change) was measured under pressure in a frequency band from 5 to 500 MHz. A lumped-element equivalent electric circuit was used to separate the impedance of the soft magnetic metal from other parasitic elements. The impedance change clearly depended on the applied pressure. It was also shown that the impedance change could be explained by a change in relative permeability, according to the theory of the SI effect. The radial stress in the diaphragm and the relative permeability exhibited a linear relationship. At a measurement frequency of 200 MHz, the largest sensor response, with a gauge factor of 385.7, was found. It was in the same order as the conventional sensors. As the proposed device is very simple, it has the potential for application as a cheap pressure sensor.https://www.mdpi.com/2072-666X/11/7/649magnetic thin filmpressure sensingstress impedance effectmicro device |
| spellingShingle | Joerg Froemel Satoru Akita Shuji Tanaka Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film Micromachines magnetic thin film pressure sensing stress impedance effect micro device |
| title | Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film |
| title_full | Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film |
| title_fullStr | Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film |
| title_full_unstemmed | Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film |
| title_short | Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film |
| title_sort | simple device to measure pressure using the stress impedance effect of amorphous soft magnetic thin film |
| topic | magnetic thin film pressure sensing stress impedance effect micro device |
| url | https://www.mdpi.com/2072-666X/11/7/649 |
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