Comparison of diamond growth with different gas mixtures in microwave plasma asssited chemical vapor deposition (MWCVD)

Comparison of diamond growth with different gas mixtures in microwave plasma asssited chemical vapor deposition (MWCVD)

In this work we study the influence of oxygen addition to several halocarbon-hydrogen gas systems. Diamond growth have been performed in a high power density MWCVD reactor built in our laboratory. The growth experiments are monitored by argon actinometry as a reference to plasma temperature and atom...

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Bibliographic Details
Main Authors: Evaldo J. Corat, Neidenei G. Ferreira, Nélia F. Leite, Vladimir J. Trava-Airoldi
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2003-01-01
Series:Materials Research
Subjects:
diamond
chemical vapor deposition
halogen
actinometry
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100012

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