Effects of oxygen flow on properties of La2Ti2O7−x films
In order to obtain the relationship between the properties and the oxygen flow rate of La _2 Ti _2 O _7−x film, the films were prepared by electron beam evaporation with various oxygen flow rates on Si and quartz substrates. The effects of oxygen flow on the properties of La _2 Ti _2 O _7−x film wer...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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IOP Publishing
2019-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ab5aba |
| _version_ | 1827869733737725952 |
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| author | Jianchao Li Junhong Su Chen Yang Changlong Cai Zhili Chen |
| author_facet | Jianchao Li Junhong Su Chen Yang Changlong Cai Zhili Chen |
| author_sort | Jianchao Li |
| collection | DOAJ |
| description | In order to obtain the relationship between the properties and the oxygen flow rate of La _2 Ti _2 O _7−x film, the films were prepared by electron beam evaporation with various oxygen flow rates on Si and quartz substrates. The effects of oxygen flow on the properties of La _2 Ti _2 O _7−x film were analyzed by XRD, XPS, optical constant and laser damage test. The result shows that the La _2 Ti _2 O _7−x film lose oxygen and lead to the transition of Ti ^4+ to Ti ^3+ in oxygen-free environment. When the oxygen flow rate is greater than 4 sccm, the content of Ti ^4+ is stable. The refractive index of La _2 Ti _2 O _7−x films decreases with the increase of oxygen flow rate and stabilizes at oxygen flow rate greater than 4 sccm. The extinction coefficient of film deposited in oxygen-free environment is less than 10 ^−4 . As the oxygen flow rate increases, the film absorption is further improved to reach 10 ^−5 at wavelengths longer than 350 nm. The laser damage threshold of films increased with increasing oxygen flow and the maximum value is 18.35 J cm ^−2 . |
| first_indexed | 2024-03-12T15:48:17Z |
| format | Article |
| id | doaj.art-ca6644eca4034345967c6650cd8ef0e8 |
| institution | Directory Open Access Journal |
| issn | 2053-1591 |
| language | English |
| last_indexed | 2024-03-12T15:48:17Z |
| publishDate | 2019-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Materials Research Express |
| spelling | doaj.art-ca6644eca4034345967c6650cd8ef0e82023-08-09T15:20:51ZengIOP PublishingMaterials Research Express2053-15912019-01-017101640710.1088/2053-1591/ab5abaEffects of oxygen flow on properties of La2Ti2O7−x filmsJianchao Li0https://orcid.org/0000-0003-2200-3168Junhong Su1Chen Yang2Changlong Cai3Zhili Chen4School of Photo-Electrical Engineering, Xi’an Technological University , Xi’an 710021, People’s Republic of ChinaSchool of Photo-Electrical Engineering, Xi’an Technological University , Xi’an 710021, People’s Republic of ChinaSchool of Photo-Electrical Engineering, Xi’an Technological University , Xi’an 710021, People’s Republic of ChinaSchool of Photo-Electrical Engineering, Xi’an Technological University , Xi’an 710021, People’s Republic of ChinaSchool of Photo-Electrical Engineering, Xi’an Technological University , Xi’an 710021, People’s Republic of ChinaIn order to obtain the relationship between the properties and the oxygen flow rate of La _2 Ti _2 O _7−x film, the films were prepared by electron beam evaporation with various oxygen flow rates on Si and quartz substrates. The effects of oxygen flow on the properties of La _2 Ti _2 O _7−x film were analyzed by XRD, XPS, optical constant and laser damage test. The result shows that the La _2 Ti _2 O _7−x film lose oxygen and lead to the transition of Ti ^4+ to Ti ^3+ in oxygen-free environment. When the oxygen flow rate is greater than 4 sccm, the content of Ti ^4+ is stable. The refractive index of La _2 Ti _2 O _7−x films decreases with the increase of oxygen flow rate and stabilizes at oxygen flow rate greater than 4 sccm. The extinction coefficient of film deposited in oxygen-free environment is less than 10 ^−4 . As the oxygen flow rate increases, the film absorption is further improved to reach 10 ^−5 at wavelengths longer than 350 nm. The laser damage threshold of films increased with increasing oxygen flow and the maximum value is 18.35 J cm ^−2 .https://doi.org/10.1088/2053-1591/ab5abaLa2Ti2O7−x filmelectron beam evaporationoptical propertieslaser-induced damage |
| spellingShingle | Jianchao Li Junhong Su Chen Yang Changlong Cai Zhili Chen Effects of oxygen flow on properties of La2Ti2O7−x films Materials Research Express La2Ti2O7−x film electron beam evaporation optical properties laser-induced damage |
| title | Effects of oxygen flow on properties of La2Ti2O7−x films |
| title_full | Effects of oxygen flow on properties of La2Ti2O7−x films |
| title_fullStr | Effects of oxygen flow on properties of La2Ti2O7−x films |
| title_full_unstemmed | Effects of oxygen flow on properties of La2Ti2O7−x films |
| title_short | Effects of oxygen flow on properties of La2Ti2O7−x films |
| title_sort | effects of oxygen flow on properties of la2ti2o7 x films |
| topic | La2Ti2O7−x film electron beam evaporation optical properties laser-induced damage |
| url | https://doi.org/10.1088/2053-1591/ab5aba |
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