Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review

Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review

High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved...

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Bibliographic Details
Main Authors:	Lucia Romano, Marco Stampanoni
Format:	Article
Language:	English
Published:	MDPI AG 2020-06-01
Series:	Micromachines
Subjects:	X-ray grating interferometry catalyst silicon gold electroplating
Online Access:	https://www.mdpi.com/2072-666X/11/6/589

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