Fabrication of micro lens array on diamond surface
Fabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
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AIP Publishing LLC
2019-12-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5130622 |
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author | Zongchen Liu Haris Naeem Abbasi Tian-Fei Zhu Yan-Feng Wang Jiao Fu Feng Wen Wei Wang Shuwei Fan Kaiyue Wang Hong-Xing Wang |
author_facet | Zongchen Liu Haris Naeem Abbasi Tian-Fei Zhu Yan-Feng Wang Jiao Fu Feng Wen Wei Wang Shuwei Fan Kaiyue Wang Hong-Xing Wang |
author_sort | Zongchen Liu |
collection | DOAJ |
description | Fabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated on a diamond surface by using the inductively coupled plasma (ICP) etching technique with a mask of polystyrene (PS) balls. First, 1 µm diameter PS balls were dispersed on the surface of deionized water. Then, the balls were transferred onto a diamond surface. Third, the sample was treated using the ICP technique to form microlenses. By increasing ICP etching time, the surface of fabricated microlenses became smoother. The simulation results demonstrate that the microlenses can greatly improve the photon collection efficiency of the embedded NV center and focus more excitation light to the NV center than bulk diamond. |
first_indexed | 2024-12-21T18:00:38Z |
format | Article |
id | doaj.art-cb61ff874cdc4dabb0e000df7a7e9eb6 |
institution | Directory Open Access Journal |
issn | 2158-3226 |
language | English |
last_indexed | 2024-12-21T18:00:38Z |
publishDate | 2019-12-01 |
publisher | AIP Publishing LLC |
record_format | Article |
series | AIP Advances |
spelling | doaj.art-cb61ff874cdc4dabb0e000df7a7e9eb62022-12-21T18:55:05ZengAIP Publishing LLCAIP Advances2158-32262019-12-01912125218125218-510.1063/1.5130622Fabrication of micro lens array on diamond surfaceZongchen Liu0Haris Naeem Abbasi1Tian-Fei Zhu2Yan-Feng Wang3Jiao Fu4Feng Wen5Wei Wang6Shuwei Fan7Kaiyue Wang8Hong-Xing Wang9Key Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaFabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated on a diamond surface by using the inductively coupled plasma (ICP) etching technique with a mask of polystyrene (PS) balls. First, 1 µm diameter PS balls were dispersed on the surface of deionized water. Then, the balls were transferred onto a diamond surface. Third, the sample was treated using the ICP technique to form microlenses. By increasing ICP etching time, the surface of fabricated microlenses became smoother. The simulation results demonstrate that the microlenses can greatly improve the photon collection efficiency of the embedded NV center and focus more excitation light to the NV center than bulk diamond.http://dx.doi.org/10.1063/1.5130622 |
spellingShingle | Zongchen Liu Haris Naeem Abbasi Tian-Fei Zhu Yan-Feng Wang Jiao Fu Feng Wen Wei Wang Shuwei Fan Kaiyue Wang Hong-Xing Wang Fabrication of micro lens array on diamond surface AIP Advances |
title | Fabrication of micro lens array on diamond surface |
title_full | Fabrication of micro lens array on diamond surface |
title_fullStr | Fabrication of micro lens array on diamond surface |
title_full_unstemmed | Fabrication of micro lens array on diamond surface |
title_short | Fabrication of micro lens array on diamond surface |
title_sort | fabrication of micro lens array on diamond surface |
url | http://dx.doi.org/10.1063/1.5130622 |
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