Fabrication of micro lens array on diamond surface

Fabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated...

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Main Authors: Zongchen Liu, Haris Naeem Abbasi, Tian-Fei Zhu, Yan-Feng Wang, Jiao Fu, Feng Wen, Wei Wang, Shuwei Fan, Kaiyue Wang, Hong-Xing Wang
Format: Article
Language:English
Published: AIP Publishing LLC 2019-12-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5130622
_version_ 1819073879345201152
author Zongchen Liu
Haris Naeem Abbasi
Tian-Fei Zhu
Yan-Feng Wang
Jiao Fu
Feng Wen
Wei Wang
Shuwei Fan
Kaiyue Wang
Hong-Xing Wang
author_facet Zongchen Liu
Haris Naeem Abbasi
Tian-Fei Zhu
Yan-Feng Wang
Jiao Fu
Feng Wen
Wei Wang
Shuwei Fan
Kaiyue Wang
Hong-Xing Wang
author_sort Zongchen Liu
collection DOAJ
description Fabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated on a diamond surface by using the inductively coupled plasma (ICP) etching technique with a mask of polystyrene (PS) balls. First, 1 µm diameter PS balls were dispersed on the surface of deionized water. Then, the balls were transferred onto a diamond surface. Third, the sample was treated using the ICP technique to form microlenses. By increasing ICP etching time, the surface of fabricated microlenses became smoother. The simulation results demonstrate that the microlenses can greatly improve the photon collection efficiency of the embedded NV center and focus more excitation light to the NV center than bulk diamond.
first_indexed 2024-12-21T18:00:38Z
format Article
id doaj.art-cb61ff874cdc4dabb0e000df7a7e9eb6
institution Directory Open Access Journal
issn 2158-3226
language English
last_indexed 2024-12-21T18:00:38Z
publishDate 2019-12-01
publisher AIP Publishing LLC
record_format Article
series AIP Advances
spelling doaj.art-cb61ff874cdc4dabb0e000df7a7e9eb62022-12-21T18:55:05ZengAIP Publishing LLCAIP Advances2158-32262019-12-01912125218125218-510.1063/1.5130622Fabrication of micro lens array on diamond surfaceZongchen Liu0Haris Naeem Abbasi1Tian-Fei Zhu2Yan-Feng Wang3Jiao Fu4Feng Wen5Wei Wang6Shuwei Fan7Kaiyue Wang8Hong-Xing Wang9Key Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Lab for Physical Electronics and Devices of the Ministry of Education, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaFabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated on a diamond surface by using the inductively coupled plasma (ICP) etching technique with a mask of polystyrene (PS) balls. First, 1 µm diameter PS balls were dispersed on the surface of deionized water. Then, the balls were transferred onto a diamond surface. Third, the sample was treated using the ICP technique to form microlenses. By increasing ICP etching time, the surface of fabricated microlenses became smoother. The simulation results demonstrate that the microlenses can greatly improve the photon collection efficiency of the embedded NV center and focus more excitation light to the NV center than bulk diamond.http://dx.doi.org/10.1063/1.5130622
spellingShingle Zongchen Liu
Haris Naeem Abbasi
Tian-Fei Zhu
Yan-Feng Wang
Jiao Fu
Feng Wen
Wei Wang
Shuwei Fan
Kaiyue Wang
Hong-Xing Wang
Fabrication of micro lens array on diamond surface
AIP Advances
title Fabrication of micro lens array on diamond surface
title_full Fabrication of micro lens array on diamond surface
title_fullStr Fabrication of micro lens array on diamond surface
title_full_unstemmed Fabrication of micro lens array on diamond surface
title_short Fabrication of micro lens array on diamond surface
title_sort fabrication of micro lens array on diamond surface
url http://dx.doi.org/10.1063/1.5130622
work_keys_str_mv AT zongchenliu fabricationofmicrolensarrayondiamondsurface
AT harisnaeemabbasi fabricationofmicrolensarrayondiamondsurface
AT tianfeizhu fabricationofmicrolensarrayondiamondsurface
AT yanfengwang fabricationofmicrolensarrayondiamondsurface
AT jiaofu fabricationofmicrolensarrayondiamondsurface
AT fengwen fabricationofmicrolensarrayondiamondsurface
AT weiwang fabricationofmicrolensarrayondiamondsurface
AT shuweifan fabricationofmicrolensarrayondiamondsurface
AT kaiyuewang fabricationofmicrolensarrayondiamondsurface
AT hongxingwang fabricationofmicrolensarrayondiamondsurface